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Rotary niobium oxide target material and preparation method thereof

A technology of niobium oxide and rotating target, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve problems not involving niobium oxide rotating target, and achieve simple and convenient production process, uniform composition and structure dense effect

Active Publication Date: 2013-04-17
宁夏中色新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, none of them involve the preparation of niobium oxide rotating targets by plasma spraying.

Method used

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  • Rotary niobium oxide target material and preparation method thereof
  • Rotary niobium oxide target material and preparation method thereof
  • Rotary niobium oxide target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A niobium oxide target with a thickness of 5 mm is sprayed on a stainless steel tube with an outer diameter of 66 mm and a length of 100 mm.

[0032] 1. Mix niobium oxide powder with a purity of not less than 99.95wt% and a particle size of about 2 μm with 4% Nb powder by weight, mechanically mix and sinter in vacuum at 1250°C for 8 hours to agglomerate and grow, and then After ball milling and sieving, 150-300 mesh niobium oxide spray powder is obtained.

[0033] 2. Treatment of sprayed substrate: Use cleaning and mechanical grinding to remove surface dirt and oxide layer, and sandblasting to make the surface of the substrate reach a certain roughness.

[0034] 3. Spraying base layer: Spray 0.2mm nickel-clad aluminum coating with plasma spraying method. The parameters are shown in Table 3.

[0035] Table 3 Plasma Spraying Nickel-clad Aluminum Primer Parameters

[0036]

[0037] 4. Spray the niobium oxide spray powder on the substrate tube that has been sprayed wi...

Embodiment 2

[0042] A niobium oxide target with a thickness of 10 mm is sprayed on a stainless steel pipe with an outer diameter of 133 mm and a length of 50 mm.

[0043]1. The 4% Nb powder by weight in the niobium oxide powder with a purity of not less than 99.95wt% and a particle size of about 2 μm is mechanically mixed and sintered in vacuum at 1250°C for 8 hours to agglomerate and grow, and then ball milled and sieving to obtain 150-300 mesh niobium oxide spray powder.

[0044] 2. Treatment of the sprayed substrate: Use cleaning and mechanical grinding to remove the surface dirt and oxide layer, and then use sandblasting to roughen the surface of the substrate to make the surface of the substrate reach a certain roughness, so as to increase the bonding strength between the substrate and the coating.

[0045] 3. Spraying base layer: Spray 0.2mm nickel-clad aluminum coating with plasma spraying method. The parameters are shown in Table 3.

[0046] 4. Spray the niobium oxide spray powde...

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Abstract

The invention relates to a rotary niobium oxide target material and a preparation method thereof. The preparation method comprises the following steps: preparing a niobium oxide spraying powder, treating a spraying matrix, spraying a priming coat and spraying the niobium oxide spraying powder on a matrix tube by using a plasma spraying process. The rotary niobium oxide target material prepared by the preparation method provided by the invention has the advantages of compact structure, uniform components, no crack and no limitation on spraying length and diameter; the thickness of the rotary niobium oxide target material can reach 12 mm, the density of the rotary niobium oxide target material is 4.6-5.2 g / cm<3>, and the component of the target is Nb2O4.3-4.9. The preparation method provided by the invention has the advantages of simple and convenient production process and lower cost.

Description

technical field [0001] The invention relates to the technical field of material preparation, in particular to a niobium oxide rotating target and a preparation method thereof. Background technique [0002] Niobium oxide is widely used in many fields of modern technology due to its unique physical and chemical properties. Utilizing its strong ultraviolet absorption ability, it can be used as a protective film for ultraviolet sensitive materials; utilizing its high refractive index characteristics of the film, it can be used with SiO 2 Films with different refractive indices can be prepared by equal coordination. Because niobium oxide has the above characteristics, it is used in optical thin film interference filters and gas sensors, etc.; the color filter film of plasma display is prepared by magnetron sputtering, which is used to improve the brightness and viewing angle of plasma display. One of the important coating materials. The methods for preparing niobium oxide thin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/34C23C4/10C23C4/06C23C4/073C23C4/08
Inventor 扈百直胥小勇刘孝宁张红梅赵清慧马文卫马建保杨小林胡海霞
Owner 宁夏中色新材料有限公司
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