Amorphous carbon complex coating and preparation method thereof

A composite coating and amorphous carbon technology, applied in the field of wear-resistant coatings, can solve problems such as hardness and unsatisfactory friction and wear performance, and achieve the effects of easy promotion and utilization, improved binding force, and good binding force

Active Publication Date: 2013-04-17
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this technical solution improves the interfacial bonding force between the amorphous carbon coating and the substrate through a composite film layer with a composition gradient, and keeps it good in hardness and friction perform

Method used

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  • Amorphous carbon complex coating and preparation method thereof
  • Amorphous carbon complex coating and preparation method thereof
  • Amorphous carbon complex coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0036] The amorphous carbon composite coating prepared by the closed-field unbalanced magnetron sputtering method adopts the device for realizing the preparation method of the amorphous carbon composite coating of the present invention in the specific embodiment, and the preparation steps are as follows:

[0037] 1) Select the medical Ti6Al4V alloy as the substrate, place the substrate on the sample holder 11 on the sample stage 10, the graphite target 6 and the graphite target 8 work, the titanium target 7 works, the titanium target 9 does not work, adjust the relationship between each target and the substrate The spacing is adjusted by 10cm, and the rotational speed of the sample stage 10 is controlled to be 3rpm;

[0038] Pre-evacuate the chamber to 4.5 x 10 -4 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 30 min at a bias voltage of -500V and a titanium target current of 0.2A and a graphite ta...

Embodiment 2

[0046] The amorphous carbon composite coating prepared by the closed-field unbalanced magnetron sputtering method adopts the device for realizing the preparation method of the amorphous carbon composite coating of the present invention in the specific embodiment, and the preparation steps are as follows:

[0047] 1) Select the medical Ti6Al4V alloy as the substrate, place the substrate on the sample holder 11 on the sample stage 10, the graphite target 6 and the graphite target 8 work, the titanium target 7 works, the titanium target 9 does not work, adjust the relationship between each target and the substrate The spacing is adjusted by 10cm, and the rotational speed of the sample stage 10 is controlled to be 3rpm;

[0048] Pre-evacuate the chamber to 4.5 x 10 -4 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 30 min at a bias voltage of -500V and a titanium target current of 0.2A and a graphite ta...

Embodiment 3

[0056] The amorphous carbon composite coating prepared by the closed-field unbalanced magnetron sputtering method adopts the device for realizing the preparation method of the amorphous carbon composite coating of the present invention in the specific embodiment, and the preparation steps are as follows:

[0057] 1) Select the medical Ti6Al4V alloy as the substrate, place the substrate on the sample holder 11 on the sample stage 10, the graphite target 6 and the graphite target 8 work, the titanium target 7 works, the titanium target 9 does not work, adjust the relationship between each target and the substrate The spacing is adjusted by 10cm, and the rotational speed of the sample stage 10 is controlled to be 3rpm;

[0058] Pre-evacuate the chamber to 4.5 x 10 -4 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 30 min at a bias voltage of 500V and a titanium target current of 0.2A and a graphite tar...

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Abstract

The invention discloses an amorphous carbon complex coating which consists of a pure titanium base, a carbon-titanium transition layer and titanium contained amorphous carbon top layer sequentially deposited on a matrix, wherein the titanium contained amorphous carbon top layer comprises amorphous carbon with atomic percent content of 90-95% and 5-10% of titanium, the amorphous carbon comprises two types such as sp2 and sp3, and the amorphous carbon atomic percent of sp3 type in the titanium contained amorphous carbon top layer is increased to 40%-50% from 20%-30%. The invention also discloses a preparation method for the amorphous carbon complex coating, and a closed field nonequilibrium magnetron sputtering is adopted, thus being beneficial to continuous chemical industry production. The amorphous carbon complex coating has the advantages of high hardness, low stress, larger thickness, low friction coefficient, excellent abrasive resistance and the like, thus being used not only in tribology field, but also in biomedicine, such as artificial hip joint, so that the service life of the material is greatly prolonged, and the amorphous carbon complex coating has wide application prospect.

Description

technical field [0001] The invention relates to the field of wear-resistant coatings, in particular to an amorphous carbon composite coating and a preparation method thereof. Background technique [0002] Medical Ti6Al4V alloy is the best material choice for artificial hip joint due to its good biocompatibility and elastic modulus closest to human bone. However, with the wide application of this medical Ti6Al4V alloy, the complications of artificial hip joints are increasingly revealed. Due to its low hardness and poor wear resistance, artificial hip joints produce a lot of wear debris in the process of friction and wear. , into the human body to cause complications, and cause poor matching between the joint head and the socket, easy to loosen, greatly reducing the service life of the artificial hip joint. Therefore, improving the tribological properties of titanium alloy materials (such as medical Ti6Al4V alloy) is an important means to reduce the friction and wear of arti...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34
Inventor 王秀丽蔡建宾谷长栋涂江平
Owner ZHEJIANG UNIV
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