MgB2 superconducting magnet for magnetic-control Czochralski (CZ) processing of monocrystal

A superconducting magnet, Czochralski single crystal technology, applied in superconducting magnets/coils, crystal growth, magnetic objects, etc., can solve the problems of high power consumption, high cooling cost, complex system, etc., achieve low power consumption, high The effect of purity and homogeneity, system simplicity

Active Publication Date: 2013-05-15
XIAN JUNENG SUPERCONDUCTING MAGNET TECH
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Problems solved by technology

[0006] The object of the invention is to provide a kind of MgB used for magnetron Czochralski single crystal 2 Superconducting magnet, which

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  • MgB2 superconducting magnet for magnetic-control Czochralski (CZ) processing of monocrystal
  • MgB2 superconducting magnet for magnetic-control Czochralski (CZ) processing of monocrystal
  • MgB2 superconducting magnet for magnetic-control Czochralski (CZ) processing of monocrystal

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Embodiment Construction

[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] A kind of MgB used for magnetron Czochralski single crystal 2 The structure of a superconducting magnet is as figure 1 As shown, the refrigerator 1 is installed on the low-temperature container, wherein the refrigerator 1 is composed of the primary cold head 8 of the refrigerator and the secondary cold head 9 of the refrigerator; The anti-radiation cold shield 3 and the coil container 4 are composed. Coil container 4 is provided with MgB 2 Superconducting winding 5. A single crystal furnace installation hole 15 is arranged in the middle of the cryogenic container.

[0025] Among them, the primary cold head 8 of the refrigerator is connected to the radiation-proof cold screen 3, and the secondary cold head 9 of the refrigerator is connected to the MgB 2 The superconducting windings 5 ​​are connected through a cold-conducting copper...

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Abstract

The invention discloses an MgB2 superconducting magnet for magnetic-control Czochralski (CZ) processing of a monocrystal. The MgB2 superconducting magnet for the magnetic-control CZ processing of the monocrystal comprises a low-temperature container, wherein a refrigerator is arranged on the low-temperature container. The MgB2 superconducting magnet for the magnetic-control CZ processing of the monocrystal has the advantages of being high in magnetic field intensity, low in manufacturing cost, simple in system, low in power consumption, easy to operate and the like. Due to the fact that heat convection of molten silicon is effectively limited, the produced monocrystal silicon has higher purity and uniformity, and the defects of oxygen and dots in the position of an interface of the crystal melt and other impurities are effectively controlled.

Description

technical field [0001] The invention belongs to the technical field of superconducting technology, and relates to a MgB used for magnetron Czochralski single crystal 2 superconducting magnet. Background technique [0002] At present, the methods for producing monocrystalline silicon mainly include the Czochralski method and the zone melting method. The monocrystalline silicon produced by the Czochralski method accounts for more than 70% of the world's total monocrystalline silicon. [0003] Since entering the VLSI era, large-diameter silicon single crystals have always been a hot research topic. However, as the crystal size increases, the thermal convection of the melt is enhanced, and the distribution uniformity of oxygen and dopants is greatly affected. In order to solve these problems, magnetic field Czochralski technology (MCZ) was gradually developed. By applying a strong magnetic field to the melt in the crucible on the basis of Czochralski method (CZ method) single...

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Application Information

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IPC IPC(8): H01F6/04H01F6/06C30B15/20
Inventor 李超闫果梁书锦熊小伟葛正福刘向宏冯勇张平祥
Owner XIAN JUNENG SUPERCONDUCTING MAGNET TECH
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