Metal glass optical grating and method and device for manufacturing same

A metal glass and grating technology, applied in the fields of condensed matter physics and material science, can solve the problems of low production efficiency, high production cost, increased preparation cycle, etc., and achieve the effects of high forming efficiency, small forming force and simple device

Inactive Publication Date: 2013-07-17
INST OF PHYSICS - CHINESE ACAD OF SCI
View PDF3 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has high requirements on the precision and stability of the stylus, and the metal and its oxides under the scribing are easy to cover the surface of the grating to form grating defects, and the preparation cycle increases significantly with the increase of the grating size, and the production efficiency Low
The replication method is to use precise photolithography technology to etch on semiconductor materials (such as silicon) or metal materials to produce a grating master, and then use the master to replicate the sub-grating. Although this method has high precision, it is due to The production process is cumbersome, the production cost is high, and the sub-grating has a multi-layer structure, which is easy to damage, and it is not an ideal preparation grating technology

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Metal glass optical grating and method and device for manufacturing same
  • Metal glass optical grating and method and device for manufacturing same
  • Metal glass optical grating and method and device for manufacturing same

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0037] The method for preparing the metallic glass grating of the present invention may further include: after cooling the metallic glass thin plate having a grating structure, polishing with a diamond polishing paste with a particle size of 1.5 μm to remove slight oxidation on the surface of the metallic glass thin plate.

[0038] The metallic glass grating provided by the invention is based on metallic glass and has a periodic groove structure thereon. The metallic glass includes Pd-based, La-based, Ce-based, Zr-based, Mg-based, Au-based, Si-based, Sc-based, Dy-based, Er-based, Ho-based, Nd-based, Ni-based, NiNb-based, rare earth-based, Pr-based, Sm-based, Tb-based, Tm-based, Yb-based metallic glasses.

Embodiment 1

[0039] Example 1, Pd 40 Cu 30 P 20 Ni 10 Fabrication of Metallic Glass Gratings

[0040] Use the traditional copper mold water cooling method to convert the composition into Pd 40 Cu 30 P 20 Ni 10 (atomic percentage) the alloy melt is rapidly cooled to obtain a metallic glass sheet with a width of 8 mm, a thickness of 1 mm, and a length of 20 mm.

[0041] On the surface of the silicon mold with a size of 10 mm × 10 mm and a thickness of about 0.5 mm, a groove structure with a depth of 10 μm and a periodicity of 8 μm is etched by photolithography technology as the microstructure of the grating (such as image 3 shown) to be used as a mold for hot stamping of metallic glass.

[0042] The aforementioned Pd 40 Cu 30 P 20 Ni10 The thin plate of metallic glass is cut into a length of 5 mm with a cutting saw and stored for later use. The two sides of each metallic glass thin plate were polished with No. 400, No. 800, and No. 1200 sandpaper in sequence to obtain a flat sur...

Embodiment 2

[0045] Example 2, La 57.5 al 1.75 Cu 12.5 Ni 12.5 Fabrication of Metallic Glass Gratings

[0046] Same as the method in embodiment 1, when just preparing the thin plate of metallic glass, the composition of alloy melt is La 57.5 al 1.75 Cu 12.5 Ni 12.5 (atomic percent), the formed metallic glass sheet has a width of 8 mm, a thickness of 1 mm, and a length of 50 mm.

[0047] When preparing the silicon mold, the period and depth of the formed microstructure were 16 μm and 5 μm, respectively.

[0048] During hot embossing, the resistance furnace is heated to about 180 degrees Celsius at a heating rate of 10 degrees Celsius / min, and the temperature is kept constant; the compression rate of the compressor of the universal material testing machine is 0.3mm / min, and the pressure is maintained when the pressure increases to 15MPa 10s.

[0049] Made La 57.5 al 1.75 Cu 12.5 Ni 12.5 Metal glass grating.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
widthaaaaaaaaaa
thicknessaaaaaaaaaa
lengthaaaaaaaaaa
Login to view more

Abstract

The invention provides a metal glass optical grating. According to the metal glass optical grating, metal glass serves as a substrate, and optical grating bodies with periodical groove structures are arranged on the substrate. The invention further provides a method and a device for manufacturing the metal glass optical grating. The metal glass optical grating has the advantages of being convenient to manufacture and high in accuracy, strength, hardness, toughness, stability and corrosion resistance.

Description

technical field [0001] The invention belongs to the fields of condensed matter physics and material science, and in particular relates to a metallic glass grating, a method and a preparation device for preparing the metallic glass grating by hot embossing. Background technique [0002] With the development of modern science and technology, spectral analysis technology plays an increasingly important role in the analysis of organic components. In spectral analysis, one of the most important components is the grating. How to prepare gratings conveniently, quickly and accurately has always been the direction of people's efforts. [0003] In order to achieve higher diffraction efficiency, existing gratings usually use reflective gratings, which use glass as a substrate, prepare microstructures on it, and then coat a reflective layer (usually an aluminum film). For this type of grating, the existing preparation methods include machine engraving and replication. The machine car...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18G02B1/00
Inventor 马将赵德乾丁大伟潘明祥白海洋汪卫华
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap