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Glass substrate and preparation method thereof

A glass substrate and ultra-clear glass technology, applied in the field of glass substrate and its preparation, can solve problems such as difficulty in ensuring transparency in the visible light band, film release, and restrictions on the development and application of diamond-like films, and achieve good visible light transmittance and durability. Abrasiveness, the effect of reducing internal stress

Active Publication Date: 2013-07-24
CHINA BUILDING MATERIALS ACAD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, the preparation technology and application research of diamond-like and doped films on the surface of metals and metalloids such as silicon and germanium are becoming more and more mature. property, and there is a large internal stress of the film deposited on the surface of the glass substrate, which easily leads to the release of the formed film, thus restricting the development and application of the diamond-like film on the glass substrate

Method used

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  • Glass substrate and preparation method thereof
  • Glass substrate and preparation method thereof
  • Glass substrate and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0045] Prepared with ordinary soda lime silica glass Na 2 O CaO 6SiO 2 Ultra-thin transparent hard DLC film as the substrate.

[0046] Step 1: Prepare the glass substrate

[0047] Cut a common glass substrate with a length of 40 mm, a width of 40 mm, and a thickness of 6 mm, wash it with deionized water, isopropanol, and deionized water for 10 minutes each, and then dry it with nitrogen for use.

[0048] Step Two: Plasma Cleaning

[0049] Put the glass substrate prepared for use in the first step into the coating chamber, pay attention to put the glass substrate on the negative potential end, close the door to vacuum, and pump the background vacuum to 2×10 -4 Pa, 30sccm of high-purity oxygen is introduced. After the gas flow is stable, turn on the radio frequency power supply, start the glow at 200W, and perform oxygen plasma cleaning for 3 minutes. After cleaning, put the glass substrate in a vacuum for 5 minutes. cool down.

[0050] The third step: plasma deposition coa...

Embodiment 2

[0057] An ultra-thin transparent and rigid DLC film with 2mm ultra-clear glass as the substrate was prepared.

[0058] Step 1: Prepare the glass substrate

[0059] Cut an ultra-clear glass substrate with a length of 700 mm, a width of 400 mm, and a thickness of 2 mm, wash it with deionized water, isopropanol, and deionized water for 15 minutes each, and then dry it with nitrogen for use.

[0060] Step Two: Plasma Cleaning

[0061] Put the glass substrate prepared for use in the first step into the coating chamber, pay attention to put the glass substrate on the negative potential end, close the door to vacuum, and pump the background vacuum to 2.5×10 -4 Pa, 50sccm of high-purity argon gas is introduced. After the gas flow is stable, turn on the radio frequency power supply, start the glow at a power of 300W, and perform argon plasma cleaning for 6 minutes. Cool the surface.

[0062] The third step: plasma deposition coating

[0063] After cleaning, stop feeding argon gas, ...

Embodiment 3

[0067] An ultra-thin transparent and rigid DLC film with 5mm quartz glass as the substrate was prepared.

[0068] Step 1: Prepare the glass substrate

[0069] Quartz glass substrates with a length of 25 mm, a width of 75 mm, and a thickness of 5 mm were cut, washed with deionized water, isopropanol, and deionized water for 12 minutes each, and then dried with nitrogen for use.

[0070] Step Two: Plasma Cleaning

[0071] Put the glass substrate prepared for use in the first step into the coating chamber, pay attention to put the glass substrate on the negative potential end, close the door to vacuum, and pump the background vacuum to 4×10 -4 Pa, 5 sccm of high-purity argon gas was introduced, and after the gas flow was stable, the radio frequency power was turned on, and the argon plasma cleaning was carried out at a power of 50W for 4 minutes. After cleaning, the glass substrate was left to stand in vacuum for 8 minutes. Cool the surface.

[0072] The third step: plasma dep...

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Abstract

The invention discloses a glass substrate and a preparation method thereof. The surface of the glass substrate is deposited with a layer of transparent, abrasion-resistant, scratch-resistant and hard diamond-like carbon film. The glass substrate of the invention has high visible light transmittance and high solar spectrum transmittance, and the abrasion resistance of the glass substrate is greatly improved compared with the uncoated glass substrates.

Description

technical field [0001] The invention relates to a glass substrate and a preparation method thereof, in particular to a glass substrate deposited with an ultra-thin transparent hard diamond-like carbon film. The film has high visible light and solar spectrum transmittance, and can greatly improve the glass substrate. Scratch resistance of the surface. Background technique [0002] Diamond-like carbon (DLC) film is a kind of amorphous carbon film, which also contains sp 3 Hybrid bonds with graphite-like sp 2 Hybrid bond, internationally defined diamond-like carbon film is an insulating hard amorphous carbon film with a hardness exceeding 20% ​​of that of diamond, including hydrogen-containing diamond-like film and hydrogen-free diamond-like film. [0003] Since the mid-1990s, the preparation of diamond-like films has received widespread attention, and has been widely used on the surfaces of various metals and alloys as scratch-resistant and anti-corrosion coatings, such as v...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/22
Inventor 孙瑶黄星烨张保军汪洪
Owner CHINA BUILDING MATERIALS ACAD
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