Device for processing microstructure sealing ring part with air plasma shaped electrode
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A plasma and forming electrode technology, applied in electrical components, circuits, discharge tubes, etc., can solve the problems of difficult processing of silicon carbide sealing ring parts, and achieve the effects of good processing quality consistency, high precision and high processing efficiency
Inactive Publication Date: 2013-08-21
HARBIN INST OF TECH
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[0006] The purpose of the present invention is to provide a device for processing microstructure sealing ring parts with atm
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[0019] Specific implementation mode one: combine figure 1 , figure 2 , image 3 As shown, it consists of plasma forming electrode 1, five-axis linkage machine tool 2, radio frequency power supply 3, airtight working cabin 5, and mixed plasma gas source 6:
[0020] The upper end surface of the plasma forming electrode 1 is insulated and connected to the vertical motion working shaft 2-1 of the five-axis linkage machine tool 2, so that the plasma forming electrode 1 is connected with the output end of the radio frequency power supply 3 as the anode of the atmospheric plasma discharge; The silicon carbide sealing ring parts 4 to be processed are clamped on the ground electrode 2-3, and the ground electrode is fixed on the working platform 2-2 of the five-axis linkage machine tool 2; the ground electrode 2-3 is grounded as the cathode of the atmospheric plasma discharge ; The five-axis linkage machine tool 2 is arranged in the airtight working cabin 5, so that the air guide hol...
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Abstract
The invention discloses a device for processing a microstructure sealing ring part with an air plasma shaped electrode and belongs to the technical field that plasma is utilized to process a silicon carbide sealing ring part and aims at solving the problem that the silicon carbide sealing ring part is difficult to process. The upper end surface of the plasma shaped electrode of the device for processing the microstructure sealing ring part with the air plasma shaped electrode is in insulation connection with a working shaft moving vertically of a five-shaft linkage machine tool, the silicon carbide sealing ring part to be processed is installed on a ground electrode in a clamping mode, the five-shaft linkage machine tool is arranged inside a sealed working cabin, a microstructure which is compensated with a microstructure surface type expected by the silicon carbide sealing ring part to be processed is formed on a shaped working surface of the lower end surface of the plasma shaped electrode, and shaping processing is carried out directly on the silicon carbide sealing ring part, the plasma shaped electrode is made to get close to the surface to be processed of the silicon carbide sealing ring part to be processed, and a certain discharging gap is kept between the plasma shaped electrode and the silicon carbide sealing ring part to be processed. The device for processing the microstructure sealing ring part with the air plasma shaped electrode is capable of processing the surface of microstructure parts such as carbide sealing rings, high in processing efficiency and high in accuracy.
Description
technical field [0001] The invention belongs to the technical field of plasma processing silicon carbide sealing ring parts. Background technique [0002] With the rapid development of modern science and technology, in nuclear industry, petroleum industry, chemical industry, chemical fiber, chemical fertilizer, atomic energy, aerospace and machinery manufacturing and other industrial fields, higher requirements are put forward for mechanical seals. [0003] Silicon carbide (SiC) has good chemical corrosion resistance, high strength, high hardness, good wear resistance, small friction coefficient, strong oxidation resistance, good dimensional stability at extremely high temperatures, low thermal expansion coefficient, and thermal stability Good sex. In addition, silicon carbide materials have the characteristics of moderate density, high specific stiffness, good thermal conductivity, thermal shock resistance, thermal shock resistance, isotropic mechanical properties, high el...
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