Device for processing microstructure sealing ring part with air plasma shaped electrode

Abstract

The invention discloses a device for processing a microstructure sealing ring part with an air plasma shaped electrode and belongs to the technical field that plasma is utilized to process a silicon carbide sealing ring part and aims at solving the problem that the silicon carbide sealing ring part is difficult to process. The upper end surface of the plasma shaped electrode of the device for processing the microstructure sealing ring part with the air plasma shaped electrode is in insulation connection with a working shaft moving vertically of a five-shaft linkage machine tool, the silicon carbide sealing ring part to be processed is installed on a ground electrode in a clamping mode, the five-shaft linkage machine tool is arranged inside a sealed working cabin, a microstructure which is compensated with a microstructure surface type expected by the silicon carbide sealing ring part to be processed is formed on a shaped working surface of the lower end surface of the plasma shaped electrode, and shaping processing is carried out directly on the silicon carbide sealing ring part, the plasma shaped electrode is made to get close to the surface to be processed of the silicon carbide sealing ring part to be processed, and a certain discharging gap is kept between the plasma shaped electrode and the silicon carbide sealing ring part to be processed. The device for processing the microstructure sealing ring part with the air plasma shaped electrode is capable of processing the surface of microstructure parts such as carbide sealing rings, high in processing efficiency and high in accuracy.

Description

technical field [0001] The invention belongs to the technical field of plasma processing silicon carbide sealing ring parts. Background technique [0002] With the rapid development of modern science and technology, in nuclear industry, petroleum industry, chemical industry, chemical fiber, chemical fertilizer, atomic energy, aerospace and machinery manufacturing and other industrial fields, higher requirements are put forward for mechanical seals. [0003] Silicon carbide (SiC) has good chemical corrosion resistance, high strength, high hardness, good wear resistance, small friction coefficient, strong oxidation resistance, good dimensional stability at extremely high temperatures, low thermal expansion coefficient, and thermal stability Good sex. In addition, silicon carbide materials have the characteristics of moderate density, high specific stiffness, good thermal conductivity, thermal shock resistance, thermal shock resistance, isotropic mechanical properties, high el...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a device for processing microstructure sealing ring parts with atmospheric plasma forming electrodes, in order to solve the difficult processing problem of silicon carbide sealing ring parts

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