Silver-alloy sputtering target for conductive-film formation, and method for producing same

A technology of conductive film and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, metal rolling, sputtering coating, etc., can solve problems such as short-circuit failure, migration, etc. Effect
CN103298970AActive Publication Date: 2013-09-11MITSUBISHI MATERIALS CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MITSUBISHI MATERIALS CORP
Publication Date
2013-09-11

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Abstract

One embodiment of the sputtering target having a component composition containing In in the amount of 0.1-1.5 mass%, with the remainder comprising Ag and inevitable impurities, wherein the average particle diameter of the alloy crystal grains is 30mum or more and less than 150mum, and the variation in the particle diameter of the crystal grains is 20% or less of the average particle diameter. One embodiment of the method for producing the sputtering target in which a melt-cast ingot having the component composition is subjected to a hot-rolling step, a cooling step, and a machining step, in this order, wherein: the hot-rolling step involves one or more passes of finish hot rolling under conditions in which the rolling reduction for each pass is 20-50%, the strain rate is 3-15 / sec, and the temperature after the pass is 400-650 DEG C; and the cooling step involves quickly cooling at a cooling rate of 200-1000 DEG C / min.
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Description

technical field

[0001] The present invention relates to a silver alloy sputtering target for forming a conductive film such as a reflective electrode of an organic EL element or a wiring film of a touch panel, and a manufacturing method thereof.

[0002] This application claims priority based on Patent Application No. 2012-002072 for which it applied in Japan on January 10, 2012, and uses the content here. Background technique

[0003] In an organic EL element, a voltage is applied between an anode and a cathode formed on both sides of an organic EL light-emitting layer, and holes and electrons are injected into the organic EL film from the anode and the cathode, respectively. And in the organic EL light-emitting layer, light is emitted when holes and electrons are combined. An organic EL element is a light-emitting element using this light-emitting principle, and has recently attracted attention as a light-emitting element for a display device. There are a passive matrix ...

Claims

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