Implantable multimodal neuromodulation electrode based on photoelectric technology and manufacturing method thereof
A photoelectric technology and multi-modal technology, applied in the direction of electrodes, phototherapy, internal electrodes, etc., can solve the problems of difficulty in planar light stimulation, inability to test for a long time, electrodes staying at the experimental level, etc., to reduce the size and increase the number of units , the effect of increasing the resolution
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[0022] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0023] see figure 1 , figure 2 , image 3 As shown, the multimodal implantable neuromodulation electrode based on photoelectric technology includes a base 3 on which 16 electrical stimulation contacts 1 and 9 optical stimulation contacts 2 are arranged, and the optical stimulation contacts 2 comprises a light-emitting diode 4 comprising an outer n-electrode 5 , a central light-emitting layer 6 and an inner p-electrode 7 .
[0024] The method for making the multimodal implantable neuromodulation electrode based on photoelectric technology comprises the following steps:
[0025] Step 1) Vacuum-coat the Parylene C material on the silicon wafer, deposit an Al mask on the Parylene C by magnetron sputtering, and pattern it by photolithography as a mask layer for etching Parylene C;
[0026] Step 2) Vacuum-coat ParyleneC ma...
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