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Method for mill processing of high-purity and high-density molybdenum alloy target

A dense and molybdenum alloy technology, which is applied in high-density molybdenum alloy targets, molybdenum alloy targets for coating, and high-purity rolling processing, can solve the problems that deformation processing cannot be carried out, and active metal components are difficult to restore. The effect of shortening the processing cycle, improving production efficiency and reducing processing costs

Active Publication Date: 2013-09-18
ADVANCED TECHNOLOGY & MATERIALS CO LTD
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for rolling and processing high-purity and high-density molybdenum alloy targets, which solves the problem that during the deformation processing of molybdenum alloys containing active metals, the active metal components are difficult to restore after oxidation, resulting in failure of deformation processing. ongoing puzzle

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  • Method for mill processing of high-purity and high-density molybdenum alloy target
  • Method for mill processing of high-purity and high-density molybdenum alloy target

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Embodiment Construction

[0023] Select molybdenum powder with a Fischer particle size of 2.8 μm and a purity of 99.9%, niobium powder with a particle size of -100 mesh and a purity of 99.95%, tantalum powder with a particle size of -100 mesh and a purity of 99.95%, titanium powder with a particle size of -200 mesh and a purity of 99.8%, Particle size -200 mesh, chromium powder with a purity of 99.9%, Fischer particle size of 6 μm, tungsten powder with a purity of 99.9%, particle size -100 mesh, zirconium powder with a purity of 99.9%, particle size -200 mesh, hafnium powder with a purity of 99.9%, particle size - 200 mesh, vanadium powder with a purity of 99.9% and cobalt powder with a Fischer particle size of 3 μm and a purity of 99.9% are used as raw materials. Table 1 lists the hot isostatic pressing billet preparation process parameters of Examples 1-14, and Table 2 lists the hot isostatic pressing billet rolling process parameters and rolling billet performance parameters of Examples 1-14.

[002...

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Abstract

The invention relates to a method for mill processing of a high-purity and high-density molybdenum alloy target and belongs to the technical field of colored target preparation. The method comprises the technical steps of powder mixing, briquetting, presintering and reduction, vacuum treatment, shaping, hot isostatic pressing jacket processing, jacket charge, jacket degassing, sealing weld, hot isostatic pressing treatment, rolling with a jacket, and finish product processing. Due to the rolling with the jacket, the method solves the problems that active metal components are difficult to reduce after oxidized during deformation processing of a molybdenum alloy containing active metal, so that the deformation processing cannot be performed. Compared with a processing method of cutting into thin blanks with a large-thickness blank line, the processing cost can be lowered greatly, the processing cycle can be shortened greatly, and the production efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of nonferrous target material preparation, in particular to a method for rolling and processing high-purity and high-density molybdenum alloy target material, which is suitable for molybdenum alloy target material for film coating in the flat panel display field. Background technique [0002] With the increasing popularity of flat-panel displays in the display field, molybdenum alloy targets, as a new type of flat-panel display wiring coating targets, are also increasing in consumption, especially for high-purity, high-density, large-size molybdenum alloy targets demand increases faster. [0003] Patent WO 2009134771A1 discloses a method for preparing a molybdenum alloy target. Its preparation process can be summarized as follows: mixing Mo powder with added element powder, pressing the green body with uniformly mixed powder, putting the green body into a container (or densifying the surface of the billet b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F3/18B22F3/16C23C14/34C22C27/04
Inventor 王铁军林同伟周卫华王广达刘国辉熊宁陈飞雄徐克玷
Owner ADVANCED TECHNOLOGY & MATERIALS CO LTD
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