Evaporation coating device and air extracting process thereof

An evaporative coating and equipment technology, applied in the field of evaporative coating equipment and its air extraction process, can solve the problems of serious oil vapor pollution, low utilization rate of air extraction, long start-up time, etc., to ensure the quality of coating products and eliminate oil vapor pollution , the effect of saving equipment and money

Inactive Publication Date: 2013-09-25
苏州摩星真空科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

In addition, during the coating process, the period that really requires high vacuum is only 3-4 minutes, which is less than 1 / 3 of the coating cycle. However, the diffusion pump takes a long time to start (about 60 minutes) and cannot be interrupted. Therefore, the utilization rate of the pumping is very low. Low (≤30%), which further increases the energy consumption of evaporation coating
[0004] 2. Serious oil vapor pollution
Diffusion pumps, Roots pumps and slide valve pumps all have oil pumps, and oil vapor pollution is large, which affects the quality of coated products
In particular, the diffusion pump uses the oil vapor jet to pump air, and the oil vapor pollution is more serious
[0005] The above shortcomings are problems that need to be solved urgently in today's evaporation coating industry, but have not been overcome

Method used

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  • Evaporation coating device and air extracting process thereof
  • Evaporation coating device and air extracting process thereof

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Effect test

Embodiment 1

[0031] Such as figure 1 with figure 2 As shown, the evaporation coating equipment provided in the first embodiment of the present invention can be used for coating enhancement, decoration, and adding new functions to the surface of the workpiece to be coated. The evaporation coating equipment includes a vacuum coating chamber 11, the vacuum coating chamber 11 is respectively connected with an arc titanium pump 12, a traction molecular pump 13, and a rough pump 14, the traction molecular pump 13 is connected with a fore-stage pump 15, the vacuum coating chamber 11 and the traction A first vacuum valve 16 is provided between the molecular pump 13, a second vacuum valve 17 is provided between the traction molecular pump 13 and the backing pump 15, and a third vacuum valve 18 is provided between the vacuum coating chamber 11 and the rough pump 14 A fourth vacuum valve 19 is provided between the vacuum coating chamber 11 and the arc titanium pump 12; among them, the rough pump 14 i...

Embodiment 2

[0049] The second embodiment is roughly the same as the first embodiment, and the difference is that the remaining space at the connection between the titanium target and the cathode arc source base of the second embodiment is also provided with an elastic thermally conductive layer, which is preferably a metal material ( Such as copper or copper alloy, etc.), the elastic thermal conductive layer can also be made of non-metallic thermal conductive materials (such as graphite, carbon fiber, etc.). When cooling water is passed into the cooling water tank in the cathode arc source base to cool the titanium target, the elastic heat conduction layer can increase the heat transfer speed between the titanium target and the cathode arc source base, and further improve the cooling of the titanium target. effectiveness.

Embodiment 3

[0051] The third embodiment is roughly the same as the first embodiment. The difference is that the evaporative coating equipment of the third embodiment is additionally equipped with a cryogenic water vapor pump, which is connected to the vacuum coating chamber. The middle vacuum stage, fine pumping and coating stages help to extract water vapor and shorten the pumping time for evaporation and coating.

[0052] The third embodiment is particularly suitable for evaporation coating equipment with a short coating cycle.

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Abstract

The invention relates to an evaporation coating device and an air extracting process thereof. The evaporation coating device adopts a set of an electric arc titanium pump, a traction molecular pump and a prepump with parallel air extracting to replace the seat of a conventional diffusion pump, a roots pump and a slide valve pump (or rotary vane pump) with series air extracting, wherein an active gas with high vacuum can be fast extracted by the electric arc titanium pump; an inert gas with high vacuum and a middle vacuum gas can be fast extracted by the traction molecular pump set. Because the electric arc titanium pump and the traction molecular pump are both low energy consumption pumps, the electric arc titanium pump mainly runs in a refined extracting stage and a coating stage and the running time is less than 1/3 of the entire air extracting time, air extracting energy consumption can be greatly reduced by the evaporation coating device. In addition, the set of the conventional diffusion pump, the roots pump and the slide valve pump does not have oil vapor pollution so that the oil vapor pollution of a conventional evaporation coating device is also eliminated by the evaporation coating device.

Description

Technical field [0001] The invention belongs to the technical field of evaporation coating, and particularly relates to an evaporation coating equipment and an air extraction process. Background technique [0002] Traditional evaporative coating equipment has a large volume. At present, large diffusion pumps + Roots pumps + slide valve pumps (or rotary vane pumps) are commonly used for air extraction. The disadvantages are as follows: [0003] 1. High energy consumption. Diffusion pumps, Roots pumps and slide valve pumps are all high energy pumps. In addition, during the coating process, the period of real high vacuum is only 3-4 minutes, which is less than 1 / 3 of the coating cycle. However, the diffusion pump has a long startup time (about 60 minutes) and cannot be interrupted. Therefore, the pumping utilization rate is very high. Low (≤30%), which further increases the energy consumption of evaporation coating. [0004] 2. Oil vapor pollution is serious. Diffusion pumps, Root...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/56
Inventor 储琦
Owner 苏州摩星真空科技有限公司
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