1.3 μm wavelength non-polarized high-efficiency light-emitting quantum dot device and design method

Abstract

The invention discloses a polarization-free high-efficiency luminescence quantum dot device with the wave length of 1.3 micrometers. An omnidirectional reflector structure (DBR) is deposited on a base, then quantum dots (InAs / GaAs) are deposited and manufactured, and then a material layer for etching a microcavity is continuously deposited. An electron beam exposure system (EBL) and inductive coupled plasma etching equipment (ICP) are used, and a designed circular air vent hole photonic crystal microcavity is manufactured on materials on a top layer. The designed quantum dot device is used, and a transverse magnetic mode (TM) with the wave length of 1.3 micrometers and a transverse electric mode (TE) with the wave length of 1.3 micrometers can be made to both have high quality factors and high luminous efficiency. The polarization-free high-efficiency luminescence quantum dot device can be effectively transmitted on the transverse magnetic mode (TM) with the wave length of 1.3 micrometers and the transverse electric mode (TE) with the wave length of 1.3 micrometers.

Description

technical field [0001] The invention belongs to the technical field of semiconductor optoelectronic devices, in particular to a non-polarization high-efficiency light-emitting quantum dot device with a wavelength of 1.3 μm and a design method thereof. Background technique [0002] In 1987, both E.Yablonovitch and S.John proposed that the energy band structure phenomenon that electrons are subject to periodic potential scattering also exists in photon systems. When electromagnetic waves move under the periodic arrangement of dielectric coefficients, some wave bands will also Due to destructive interference, it cannot propagate in the system, forming a photonic energy gap. This kind of substance with a periodic refractive index is called a photonic crystal. When the lattice constant or period of the photonic crystal is equivalent to the order of magnitude of the wavelength of the photon being operated, it will cause the so-called strong scattering effect, resulting in a photon...

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Problems solved by technology

[0004] However, in previous studies, common photonic crystal microcavities are usually air hole arrays or dielectric column arrays, and due to their structure, only one polarized light (transverse magnetic mode (TM) or Transverse electric mode (TE)) has a good quality factor, it is difficult to have a high quality factor for two polarized lights of the same wavelength

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