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Flexible curved surface micro lens array and manufacturing method and application thereof

A technology of a microlens array and a manufacturing method, which is applied in the directions of lenses, microlithography exposure equipment, photolithography process exposure devices, etc., can solve the problems of many equipments, difficulty in hot pressing process, and many process steps, etc., and achieves less equipment and cost. low effect

Active Publication Date: 2015-04-29
GUANGZHOU INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This method has many process steps and requires more equipment, and it is also difficult to implement the hot pressing process.

Method used

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  • Flexible curved surface micro lens array and manufacturing method and application thereof
  • Flexible curved surface micro lens array and manufacturing method and application thereof
  • Flexible curved surface micro lens array and manufacturing method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Embodiment 1 (for preparing the embodiment of uniform flexible surface microlens array)

[0036] see figure 1 , figure 1 It is only a schematic representation of the preparation process, figure 1 The number of microlenses in does not represent a limitation on the specific number of microlenses of the actually prepared microlens array. In practice, the specific number of columns of the microlens array can be determined according to needs. The uniform flexible curved surface microlens array of the present invention is prepared according to the following steps:

[0037] Step A1: Take a flexible transparent substrate 1 with a flat surface (specifically, a PET substrate can be selected), the size of the substrate can be 2.5cm×2.5cm, and the thickness of the substrate can be about 250 μm. The substrate was cleaned with alcohol and rinsed with isopropanol, then dried, baked at 90°C for 10 minutes, cooled naturally, and treated with oxygen plasma on the surface of the flexib...

Embodiment 2

[0046] Embodiment 2 (for preparing the embodiment of non-uniform flexible surface microlens array)

[0047] see Figure 6 , the non-uniform flexible curved microlens array of the present invention is prepared according to the following steps.

[0048] Step B1: Take a flexible transparent substrate 1 with a flat surface (specifically, a PET substrate can be selected), the size of the substrate can be 3.5cm×3.5cm, and the thickness of the substrate can be about 250 μm. The substrate was cleaned with alcohol and rinsed with isopropanol, then dried, baked at 90°C for 10 minutes, cooled naturally, and treated with oxygen plasma on the surface of the flexible transparent substrate to increase the surface energy of the flexible transparent substrate and increase the subsequent photoresist contact strength with the substrate.

[0049] Step B2: Apply the positive photoresist AZ4620 evenly on the upper surface of the treated PET substrate by spin coating, and spin the glue twice. Sec...

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Abstract

The invention provides a flexible curved surface micro lens array, and a manufacturing method and an application of the flexible curved surface micro lens array. The manufacturing method comprises the following steps that firstly, a flexible transparent substrate is taken, is cleaned through ethyl alcohol, is eluted through isopropyl alcohol, is then blown dry, and is naturally cooled after being baked; secondly, oxygen plasma processing is conducted on the surface of the substrate; thirdly, the upper surface of the well processed flexible transparent substrate is evenly coated by positive photoresists; fourthly, the substrate is placed below a mask plate, and ultraviolet exposure and developing are conducted on the positive photoresists on the upper surface of the substrate so as to form a plurality of array-shaped cylindrical photoresist blocks on the upper surface of the substrate; fifthly, the flexible transparent substrate with the array-shaped cylindrical photoresist blocks is placed in a vacuum drying oven and is heated, fused and naturally cooled; sixthly, two side edges of the flexible transparent substrate with micro lens arrays are fixed on two clamping plates of a fixture respectively. The number of required equipment for preparing the flexible curved surface micro lens array is small, precise and expansive equipment is not needed, and the flexible curved surface micro lens array is simple in processing method and low in manufacturing cost.

Description

technical field [0001] The invention relates to the technical field of microlens array production, in particular to the production and application of a flexible curved surface microlens array. Background technique [0002] Biological compound eyes represented by insect compound eyes usually have the advantages of small size, large field of view, and sensitivity to high-speed moving objects. At present, some bionic compound eye imaging systems based on microlens arrays have been proposed. However, due to the limitations of the manufacturing process, most of these compound eye imaging systems have a planar structure, which largely loses the outstanding advantage of the curved compound eye structure - large field of view. In nature, biological compound eyes are composed of a group of "small eyes" gathered together, and usually the entire compound eye has a curved structure. The entire field of view can be divided into several parts through these ommatidia, and each ommatidium...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G03F7/20
Inventor 金建邸思谢占功陈贤帅杜如虚
Owner GUANGZHOU INST OF ADVANCED TECH CHINESE ACAD OF SCI
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