Manufacturing method of micro lens array mold

A technology of a microlens array and a manufacturing method, which is applied in the direction of the photoplate-making process of the lens and the pattern surface, and the coating equipment of the photo-plate-making process, which can solve the problems of high requirements and easy formation of undercuts on the concave surface, and achieve low cost and good quality. Surface smoothness, increase the effect of closeness

Inactive Publication Date: 2013-10-16
XIAMEN UNIV OF TECH
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Problems solved by technology

This method has high requirements for equipment and working environmen

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  • Manufacturing method of micro lens array mold
  • Manufacturing method of micro lens array mold
  • Manufacturing method of micro lens array mold

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Embodiment Construction

[0059] The present invention will be described in further detail below with reference to the drawings and specific embodiments.

[0060] The invention discloses a method for manufacturing a micro lens array mold, such as figure 1 As shown, including the following steps:

[0061] Step 1: Use the UV-LIGA process to make a metal nickel mold with a columnar micro-hole array structure on the surface;

[0062] 1. Fabrication of SU8 glue micro-pillar array.

[0063] (1) Cleaning and baking of silicon substrate;

[0064] The following cleaning methods can be used: First, use concentrated sulfuric acid to clean: put the silicon wafer (silicon substrate) into a beaker, pour an appropriate amount of concentrated sulfuric acid, and place it on the electric stove in the exhaust cabinet, turn on the exhaust fan, and heat for 10-15 minutes. After the concentrated sulfuric acid smokes, unplug the plug; after cooling for half an hour, pour the concentrated sulfuric acid into the waste liquid bottle...

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Abstract

The invention discloses a manufacturing method of a micro lens array mold. The method mainly comprises the following steps that 1. A UV-LIGA technology is used to make a metallic nickel mold whose surface possesses a columnar micro hole array structure; 2. In a vacuum environment, a UV solidification glue is coated in the columnar micro hole array of the nickel mold; 3. An obtained product is rotated so that a part of the UV solidification glue is uniformly rotated out of the micro hole and a stable concave shape is formed, and then an ultraviolet source is used to solidify the solidification glue so that the micro lens array mold can be obtained. By using the method, because a rotation mode is directly used, a micro lens mold cavity possesses good surface flatness so as to guarantee an optical characteristic of the manufactured micro lens array. Through adjusting a viscosity of the UV glue, a rotation rate and other modes, rise and curvature of the micro lens are controlled so as to adjust a focal length of the micro lens and increase a degree of freedom of manufacturing the micro lens array.

Description

Technical field [0001] The invention relates to the technical field of micro-electromechanical systems and the field of micro-optics, in particular to a method for manufacturing a micro lens array mold. Background technique [0002] Microlens and Microlens array are the most important micro-optical devices. The diameter of the microlens ranges from 10μm to 1mm. The array formed by these microlenses arranged in a certain shape on the substrate is called a microlens. Array. Like traditional lenses, the basic functions of microlenses and microlens arrays are focusing and imaging, etc. They are mainly used in optical fiber communication fields such as optical collimation, optical coupling, and optical interconnection, and are widely used in communication, display and imaging devices. Microlens and microlens array have the advantages of small unit size and high integration, which make them show unparalleled superiority in the production of micro-opto-electromechanical systems. [0003...

Claims

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Application Information

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IPC IPC(8): G02B3/00G03F7/00G03F7/16G03F7/26
Inventor 谢丹常雪峰罗善明王建
Owner XIAMEN UNIV OF TECH
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