Communication method of immersion liquid transmission system applied to immersion lithography machine
A technology of immersion lithography and transmission system, which is applied in the direction of transmission system, microlithography exposure equipment, photoplate making process exposure device, etc., to achieve the effect of ensuring accuracy, improving degree of freedom, and improving controllability
Inactive Publication Date: 2013-11-13
ZHEJIANG UNIV
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The invention discloses a communication method of immersion liquid transmission system applied to an immersion lithography machine. The transmission system comprises a control subsystem, which is taken as the server; a water process subsystem, which is taken as the client terminal; a transmission control subsystem and a position adjusting subsystem. A network topology construction is formed between the control subsystem, the water processing subsystem, the transmission control subsystem and the position adjusting subsystem, and the data exchange is carried out through the Ethernet. The server/client terminal mode is adopted, a virtual communication relationship is established between the control subsystem, the water processing subsystem, the transmission control subsystem and the position adjusting subsystem, each virtual communication relationship is provided with a virtual communication link, and each virtual communication link maintains the session between a pair of nodes. The communication of the control subsystem in the immersion liquid transmission system of an immersion lithography machine with other subsystems is achieved through the communication method, communication and information transmission functions are effectively achieved, and thus high-efficient and sequent operation of the immersion liquid transmission system is achieved.
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