Communication method of immersion liquid transmission system applied to immersion lithography machine

A technology of immersion lithography and transmission system, which is applied in the direction of transmission system, microlithography exposure equipment, photoplate making process exposure device, etc., to achieve the effect of ensuring accuracy, improving degree of freedom, and improving controllability

Inactive Publication Date: 2013-11-13
ZHEJIANG UNIV
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  • Application Information

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Problems solved by technology

[0005] In order to solve the communication problem between the control subsystem and the water treatment subsystem, the transmission control subsystem, and the pose adjustment subsystem in the immersio

Method used

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  • Communication method of immersion liquid transmission system applied to immersion lithography machine
  • Communication method of immersion liquid transmission system applied to immersion lithography machine
  • Communication method of immersion liquid transmission system applied to immersion lithography machine

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[0030] The specific implementation process of the present invention will be described in detail below in conjunction with the drawings and embodiments.

[0031] like figure 1 As shown, the immersion liquid transmission system includes the control subsystem as the server, the water treatment subsystem as the client, the transmission control subsystem and the posture adjustment subsystem; the control subsystem and the water treatment subsystem, the transmission control subsystem and the position adjustment subsystem. The attitude adjustment subsystems are constructed to form a network topology, and Ethernet is used for data exchange; the server / client mode is adopted to establish between the control subsystem and the water treatment subsystem, the transmission control subsystem and the attitude adjustment subsystem A virtual communication relationship establishes a virtual communication link for each pair of virtual communication relationships, and each virtual communication lin...

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Abstract

The invention discloses a communication method of immersion liquid transmission system applied to an immersion lithography machine. The transmission system comprises a control subsystem, which is taken as the server; a water process subsystem, which is taken as the client terminal; a transmission control subsystem and a position adjusting subsystem. A network topology construction is formed between the control subsystem, the water processing subsystem, the transmission control subsystem and the position adjusting subsystem, and the data exchange is carried out through the Ethernet. The server/client terminal mode is adopted, a virtual communication relationship is established between the control subsystem, the water processing subsystem, the transmission control subsystem and the position adjusting subsystem, each virtual communication relationship is provided with a virtual communication link, and each virtual communication link maintains the session between a pair of nodes. The communication of the control subsystem in the immersion liquid transmission system of an immersion lithography machine with other subsystems is achieved through the communication method, communication and information transmission functions are effectively achieved, and thus high-efficient and sequent operation of the immersion liquid transmission system is achieved.

Description

technical field [0001] The invention relates to a communication method applied in an immersion photolithography machine, in particular to a communication method applied to an immersion liquid delivery system in an immersion photolithography machine. Background technique [0002] The lithography machine is one of the core equipment for manufacturing VLSI. The modern lithography machine is mainly based on optical lithography. It uses the optical system to accurately project and expose the pattern on the mask to the silicon coated with photoresist. Chip. It includes a laser light source, an optical system, a projection mask composed of chip graphics, an alignment system, a mechanical transmission system and a control subsystem. [0003] Immersion lithography (Immersion Lithography) equipment fills a liquid with a high refractive index between the last projection objective lens and the silicon wafer, which improves the numerical aperture of the projection objective lens ( NA),...

Claims

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Application Information

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IPC IPC(8): G03F7/20H04L29/06
Inventor 傅新陈文昱张志杰杨凯
Owner ZHEJIANG UNIV
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