AMOLED (active matrix organic light emitting diode) and manufacturing method thereof
A technology of light-emitting diodes and manufacturing methods, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve problems such as low luminous efficiency, achieve high luminous efficiency, high stability, and improve the effect of electron injection efficiency
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Embodiment 1
[0044] This embodiment provides a method for manufacturing an active matrix organic light emitting diode panel, such as figure 2 As shown, the method includes:
[0045] preparing a thin film field effect transistor array substrate, the thin film field effect transistor array substrate comprising a substrate and a plurality of thin film field effect transistors arranged on the surface of the substrate;
[0046] One of the formation methods of a single TFT is: first form a gate on the substrate, then form a gate insulating layer or an etching barrier layer that completely covers the gate on the gate, and then form a gate insulating layer or an etching barrier layer on the surface of the gate insulating layer or etching barrier layer. An active layer is formed on the active layer, and then a source electrode and a drain electrode are formed on the active layer, and finally a passivation layer is covered on the source electrode and the drain electrode, and a drain contact hole ex...
Embodiment 2
[0085] Based on Embodiment 1, this embodiment provides an active matrix organic light-emitting diode panel, which is produced by the manufacturing method provided in Embodiment 1. The device includes:
[0086] A thin film field effect transistor array substrate, the thin film field effect transistor array substrate comprising a substrate and a plurality of thin film field effect transistors arranged on the surface of the substrate;
[0087] a cathode located on the surface of the thin film field effect transistor array substrate, the cathode is connected to the drain of the thin film field effect transistor;
[0088] An electron injection layer located on the surface of the cathode, the electron injection layer comprising a first electron injection layer located on the surface of the cathode and adjacent to the cathode and a second electron injection layer located on the surface of the first electron injection layer , the first electron injection layer is an aluminum layer, an...
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