Deep trench isolation forming method of CIS device, and semiconductor device structure
A deep trench isolation and deep trench technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., can solve problems such as difficult to meet process requirements, achieve the effect of improving the performance of CIS devices and optimizing the forming process
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[0049] Next, the technical solutions in the present application will be described in conjunction with the accompanying drawings, as will be apparent from the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative labor are the scope of the present application.
[0050] In the description of this application, it is to be described in the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. The orientation or position of the indication is based on the orientation or positional relationship shown in the drawings, which is intended to facilitate the description of the present application and simplified description, rather than indicating or implying that the device or component must have a specific orientation. Construct and operation, so it is not understood as limiting the pres...
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