Atomic layer deposition method and atomic layer deposition device for coating ultrafine powder

Abstract

The invention discloses an atomic layer deposition method and an atomic layer deposition device for coating ultrafine powder. The atomic layer deposition method is characterized in that fluidized gas is introduced into an adsorption process of a precursor, powder is blown away by utilizing the fluidized gas, and sufficient dispersion of the powder is realized. The atomic layer deposition device comprises a reaction cavity, a supply system, a vacuum system, a heating system, a monitoring system and a control system and is characterized in that the supply system comprises a fluidized gas source, and the fluidized gas enters a reaction cavity by virtue of a fluidized gas delivery branch and is used for blowing away the powder into the whole reaction region. By adopting the atomic layer deposition method and the atomic layer deposition device, powder coating rate and deposition uniformity can be effectively improved, and massive powder can be coated in each deposition process, so that the powder coating efficiency is improved.

Description

technical field [0001] The invention relates to atomic layer deposition technology, more specifically, to an atomic layer deposition method and device for coating ultrafine powder. Background technique [0002] With the superfineness of the material, its surface electronic structure and crystal structure have changed, resulting in surface effects, small size effects, quantum effects and macroscopic quantum tunneling effects that bulk materials do not have, making ultrafine powders different from conventional particles. Compared with the material, it has a series of excellent physical and chemical properties, but it also has a series of disadvantages such as easy agglomeration, easy oxidation, and unstable properties. Coating the protective layer on the surface of ultrafine powder can not only overcome the above shortcomings, but also make the coated powder particles have anti-sintering performance, and the core-shell structure can even make the powder a composite material wi...

AI Technical Summary

Problems solved by technology

This method has the following disadvantages: (1) The dispersion effect on small particles is poor, and they are easy to agglomerate; (2) The agglomerates of powder particles after agglomeration are of different sizes, and they will be separated inside and outside under the action of centrifugal force during rotation, resulting in The coating of the inner layer particles is more difficult, and the coating rate is much lower than that of the outer layer, and the difference between the film thickness and the outer layer particles is large, which cannot meet the requirements of high uniformity for powder coating

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