N-type crystalline silicon and preparation method thereof
A crystalline silicon, N-type technology, applied in the field of N-type crystalline silicon and its preparation, can solve problems such as difficult to achieve precise control of resistivity
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[0023] Please refer to figure 1 , discloses a preparation method of N-type crystalline silicon, comprising the following steps:
[0024] S110. Throwing silicon material containing N-type dopant into the crucible, wherein the inner side of the side wall of the crucible is coated with a P-type doping compensator coating, and the position of the P-type doping compensator coating is at the input The height difference between the surface of the silicon liquid after melting the silicon material containing the N-type dopant and the crystalline silicon generated by the silicon liquid is within the range. Please refer to figure 2 The height of the silicon liquid surface from the bottom of the crucible after the silicon material of the N-type dopant is melted in the crucible is L1, the height of the crystalline silicon generated by the silicon liquid is L2, and the position of the P-type doped compensator coating 110 is at Between L1 and L2, the height of crystalline silicon is the h...
Embodiment 1
[0033] 1. Dilute a certain amount of boron powder with silicon powder and quartz powder with water and add an appropriate amount of binder as the raw material for coating.
[0034] 2. Spray silicon nitride coating on the inner wall of the crucible.
[0035] 3. Then determine the coating position by calculation, and coat the prepared raw materials within the calculated position range by spraying or brushing to form a layer of coating, in which the ingot with a charging capacity of 480kg and the inner diameter of the crucible is 800mm, It is calculated that the height of the silicon liquid surface after melting is 294mm, and the crystal height after the crystal growth is 322mm, so it can be determined that the coating position is between 292-322mm from the bottom of the crucible.
[0036] 4. Put 480kg of polysilicon and the mixture of silicon-phosphorus master alloy into the crucible.
[0037] 5. Heating and melting, directional solidification, so that the silicon liquid can ge...
Embodiment 2
[0039] 1. Dilute a certain amount of silicon-boron alloy with silicon powder and quartz powder with water and add an appropriate amount of binder as the raw material for coating.
[0040]2. The position of the coating is determined by calculation, and the prepared coating raw materials are fixed in the determined position range by spraying or brushing to form a layer of coating with compensation ability. The ingot with a charging capacity of 800kg, the crucible The inner diameter is 1000mm, the height of the silicon liquid surface after melting is 314mm, and the crystal height after the crystal growth is 343mm, so the coating position is determined to be between 314-343mm from the bottom of the crucible.
[0041] 3. Then continue to spray silicon nitride coating on the inner wall of the crucible.
[0042] 4. Put 800kg of the mixture of polysilicon and arsenic powder into the crucible.
[0043] 5. Directional solidification, which melts the primary polysilicon material and for...
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