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Mass analysis device

A mass analysis device and mass analysis technology, applied to measuring devices, analytical materials, mass spectrometers, etc., can solve problems such as troublesome mass analysis operations, and achieve the effect of easy replacement and suppression of water carry

Active Publication Date: 2016-05-25
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, by reproducing this replacement work, the mass analysis work of the mass spectrometer will inevitably become troublesome.

Method used

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Experimental program
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no. 1 approach ）

[0050] Figure 1A A configuration diagram showing a mass spectrometer 100 according to the first embodiment of the present invention. The mass spectrometer 100 has a vacuum chamber 30 . A turbomolecular pump 36 and a rough vacuum pump 37 are connected in series to the vacuum chamber 30 . Accordingly, the inside of the vacuum chamber 30 can be decompressed to a high vacuum of about 0.1 Pa or less. A vacuum gauge 35 is provided in the vacuum room 30 to measure the degree of vacuum (pressure) in the vacuum room 30 . The measured degree of vacuum is sent to the control circuit 38 . In the control circuit 38, the operations of the turbomolecular pump 36 and the rough vacuum pump 37 are controlled according to the received vacuum degree. The mass spectrometer 102 is accommodated in the vacuum chamber 30 . The detailed configuration will be described later, but in the mass spectrometer 102 , ion accumulation, evacuation waiting, ion selection, ion dissociation, mass scanning, etc...

no. 2 approach ）

[0116] Figure 9A configuration diagram showing the sample introduction unit 104 of the mass spectrometer according to the second embodiment of the present invention. The second embodiment differs from the first embodiment in that it has a dilution mechanism (the dilution pipe 46 and flow control section 47). The dilution pipe 46 is detachably fixed to the cartridge main body 16 by the hook 16e. The flow control unit 47 is supported by the main body of the sample introduction unit 104 . The dilution pipe 46 is connected to the air chamber 16b through the through-hole 16d provided in the cylinder main body 16 . An appropriate amount of external air (atmospheric atmosphere) adjusted by the flow rate control unit 47 can be attached to the air chamber 16 b through the dilution pipe 46 and the through hole 16 d like the external air flow 49 . Thereby, the sample gas can be diluted when the concentration of the sample gas is high, for example. In addition, the flow control unit...

no. 3 approach ）

[0118] Figure 10 A configuration diagram showing the sample introduction unit 104 of the mass spectrometer according to the third embodiment of the present invention. The third embodiment differs from the second embodiment in that it has a pipe heater (fluid heating mechanism) 48 for heating the fluid in the dilution pipe 46, and a metal container heater (gas heating mechanism) for heating the sample gas in the gas chamber 16b. ) 52. A gas filter provided in the through hole 16c and adsorbing the sample gas in the through hole 16c. In addition, the gas cell 16 b of the second embodiment is replaced with a metal having high thermal conductivity, and becomes the gas cell metal container 51 . The gas cell metal container 51 is heated by the metal container heater 52, and the sample gas inside can be prevented from cooling and condensing. In addition, the piping 46 for dilution is also heated by the piping heater 48 , and becomes warm when outside air (atmosphere) passes throug...

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Abstract

The objective of the present invention is to provide a mass spectrometer 100 capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer 100 includes a mass spectrometry section 102, an ion source 101 the internal pressure of which is reduced by a differential pumping from the mass spectrometry section 102 and the ion source 101 ionizes the sample gas, a sample container 17 in which the sample gas is generated by vaporizing the measurement sample, a thin pipe 11 that introduces the sample gas generated in the sample container 17 into the ion source 101, an elastic tube 12 of openable and closable that connects the sample container 17 and the thin pipe 11, a pair of weirs 13a, 13b that closes or opens the elastic tube 12 so as to sandwich the elastic tube 12, and a cartridge 8 that integrates the sample container 17, the thin pipe 11, and the elastic tube 12, and is detachable in a lump from a main body of the mass spectrometer 100. The sample container 17 is detachable from the cartridge 8 during the detachment state of the cartridge 8.

Description

technical field [0001] The present invention relates to a mass spectrometer, and more particularly to a mass spectrometer suitable for small size and light weight. Background technique [0002] In the mass spectrometer, the ionized measurement sample (sample gas) is subjected to mass spectrometry by a mass spectrometer. The mass spectrometer is housed in a vacuum room and stored in a high vacuum of 0.1 Pa or less. On the other hand, the ionization of the sample gas is performed under the atmospheric pressure shown in Patent Document 1. As shown in 2, ionization is performed under a reduced pressure of about 10 to 100 Pa, so there is a difference between the pressure in the environment where ionization is performed and the pressure in the environment where mass analysis is performed. Therefore, in order to introduce the ionized sample gas into the mass spectrometer while maintaining the vacuum degree (pressure) of the mass spectrometer within the range capable of mass spectr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J49/42G01N27/62
CPCH01J49/0404H01J49/0409H01J49/0422H01J49/0431H01J49/0495H01J49/24H01J49/00H01J49/005H01J49/04H01J49/10
Inventor 诸熊秀俊石黑浩二熊野峻
Owner HITACHI HIGH-TECH CORP