Micro gas sensor recoverable for repeated preparation and preparation method thereof

A gas sensor and heater technology, applied in the direction of material resistance, can solve the problems of reducing production and use costs, prolonging the use time of sensor heating elements, etc., and achieve the effects of improving consistency, long service life, and low power consumption

Inactive Publication Date: 2013-12-25
CHINA UNIV OF MINING & TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Technical problem: The purpose of this invention is to provide a recyclable and repeatedly prepared micro-gas sensor and its preparation method, so as to solve the problem that gas sensors such as thermal catalytic combustion gas sensors in the prior art cannot prolong the heating of the sensor by re-preparing the catalyst carrier and catalyst. Component service time, reducing production and use costs

Method used

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  • Micro gas sensor recoverable for repeated preparation and preparation method thereof
  • Micro gas sensor recoverable for repeated preparation and preparation method thereof
  • Micro gas sensor recoverable for repeated preparation and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0027] Example 1: In figure 1 , figure 2 with image 3 Among them, the microgas sensor includes: a silicon support 101, a fixed end 102, a symmetrically arranged silicon cantilever 103, a silicon heater 104, and a catalyst carrier 106; the silicon heater 104 is preferably annular, and the annular The middle of the silicon heater 104 is preferably provided with two symmetrical heat dissipation-supporting silicon blocks 105; the silicon support 101 includes a silicon substrate 11 and a buried layer of silicon oxide 12 disposed on the silicon substrate 11; The silicon cantilever 103 and the silicon heater 104 both include a supporting silicon layer 21 and a silicon oxide layer 23 outside the supporting silicon layer 21; one end of the silicon cantilever 103 is connected to one side of the silicon heater 104, and the other end is connected to the silicon heater 104. The fixed end 102 on the support 101 is connected; the fixed end 102 is arranged on the buried layer silicon oxid...

Embodiment 2

[0040] Embodiment 2: described wire bonding method: make the lead wire of sensor, as Figure 7 As shown, the separated silicon device 110 is fixed on the support plate 107. When fixing, at least the silicon heater 104 and the silicon cantilever 103 are positioned to protrude from the support plate 107. The support plate 107 is provided with a metal electrode 108; the metal lead 109 is connected to The metal electrode 108 on the support plate 107 and the metal layer 22 of the electrical extraction pad Pad on the isolated silicon device 110 of the microgas sensor.

[0041] The first preparation sequence is to first prepare the discrete silicon device 110 by using the preparation method of the separated silicon device; then use the method of the catalyst carrier to wrap the silicon heater and the wire bonding method to complete the first preparation.

[0042] Others are the same as in Example 1.

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Abstract

The invention discloses a micro gas sensor recoverable for repeated preparation and a preparation method thereof, and belongs to micro gas sensors and preparation methods thereof. The silicon heater of the micro gas sensor is provided with a heat dissipation-support silicon block at the center; one ends of silicon cantilevers are connected with the silicon heater, and the other ends of the silicon cantilevers are connected with fixing ends of a silicon bearer; the fixing ends are arranged on silicon oxide buried layer of the silicon bearer; the silicon layer of each fixing end is provided with a doped silicon layer; a metal layer contacts the doped silicon layer of each fixing end via the window of the silicon oxide layer for formation of ohmic contact; the silicon heater is completely embedded in a catalyst carrier, and the catalyst carrier penetrates the center of the silicon heater and forms an own integrated structure. The MEMS processing technology is employed for the low-energy-consumption gas sensor for detecting gas concentration in coal mines, the preparation technology is compatible with the CMOS technology, and batch production can be realized; the catalyst carrier and the catalyst can be prepared repeatedly after the gas sensor is recovered; and the micro gas sensor is long in service life, stable in performance, small in volume and low in cost.

Description

technical field [0001] The invention relates to a micro-gas sensor and a preparation method thereof, in particular to a recyclable and repeatedly-preparable micro-gas sensor and a preparation method thereof. Background technique [0002] At present, the catalytic combustion gas sensor based on traditional platinum wire heating is still widely used in coal mines, but its power consumption is relatively large, which cannot well meet the application requirements of the Internet of Things for low-power gas sensors. Other gas sensors cannot adapt to the environment of high humidity underground in coal mines, especially the application requirements of underground portable equipment. [0003] Most of the existing reported microgas sensors still use metallic platinum as the heating material. The metallic platinum used for heating is made on the silicon support material. The heating resistor made of metallic platinum is also a temperature measuring resistor. The catalyst carrier is l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/16
Inventor 马洪宇王文娟丁恩杰赵小虎程婷婷
Owner CHINA UNIV OF MINING & TECH
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