Conductive film, manufacturing method thereof, and sputtering target used in the manufacturing method
A conductive film and manufacturing method technology, applied in the field of sputtering targets, can solve the problems of organic EL panel production yield decline, inability to obtain sufficient heat resistance, small surface roughness, etc., to suppress defects and prevent yield decline , Maintain the effect of reflectivity
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[0043] Hereinafter, the evaluation results of examples of the conductive film formed according to the above-mentioned embodiment will be described. First, in order to produce a sputtering target for a conductive film, Ag with a purity of 99.9% by mass or more, at least one of In and Sn with a purity of 99.9% by mass or more, and Sb are used as raw material powders so that they have a predetermined composition. weighing. Next, Ag is melted in a high vacuum or an inert gas atmosphere, and at least any one of In and Sn and Sb are added to the obtained molten metal in predetermined contents. Thereafter, melting is carried out in a vacuum or an inert gas atmosphere to manufacture a smelted ingot of an Ag alloy composed of the following components: the silver alloy contains 0.1 to 1.5 atomic % of at least one of In and Sn, and contains 0.1 to 3.5 The atomic % is Sb, and the rest is composed of Ag and unavoidable impurities.
[0044] Among them, the melting of Ag is carried out in ...
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