Preparation method for graphene
A graphene and equipment technology, applied in the field of new material synthesis, can solve the problems of inability to effectively control graphene morphology, complex preparation process, difficult vertical morphology, etc., and achieve good consistency, simple preparation process, and complete crystal structure. Effect
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Embodiment 1
[0031] A kind of preparation method of graphene, comprises the following steps:
[0032] (1) Clean the silicon wafer with ethanol, acetone and deionized water respectively, deposit 0.01mol / L ferric nitrate on the silicon wafer, place the silicon wafer with ferric nitrate upside down on the top of the chemical vapor deposition equipment, attach One side of the ferric nitrate faces the bottom of the chemical vapor deposition equipment and is sealed;
[0033] (2) Introduce 50 sccm of hydrogen into the chemical vapor deposition equipment for 30 minutes, and start heating after the air is exhausted;
[0034] (3) After heating to 900°C, start feeding 1000 sccm of methane and keep it for 30 minutes to grow vertical graphene. After the reaction is over, stop heating, stop feeding methane, cool to room temperature under the protection of hydrogen, and stop feeding Hydrogen, to obtain graphene perpendicular to the surface of the silicon wafer. Finally, the graphene is washed with hydr...
Embodiment 2
[0037] A kind of preparation method of graphene, comprises the following steps:
[0038] (1) Clean the quartz glass plate with ethanol, acetone and deionized water respectively, spin-coat 0.1mol / L cobalt nitrate on the quartz glass plate, and place the quartz glass plate with cobalt nitrate upside down in the chemical vapor deposition equipment. The top, with the side with cobalt nitrate facing the bottom of the chemical vapor deposition equipment, is sealed;
[0039] (2) Introduce 200 sccm of hydrogen into the chemical vapor deposition equipment for 10 minutes, and start heating after the air is exhausted;
[0040] (3) After heating to 1050°C, start feeding 100 sccm of acetylene and keep it for 300 minutes to grow vertical graphene. After the reaction is over, stop heating, stop feeding acetylene, cool to room temperature under the protection of hydrogen, and stop feeding Hydrogen, resulting in graphene perpendicular to the surface of the quartz glass plate. Finally, the gr...
Embodiment 3
[0042] A kind of preparation method of graphene, comprises the following steps:
[0043] (1) Clean the silicon dioxide wafer with ethanol, acetone and deionized water respectively, deposit 1mol / L nickel nitrate on the silicon dioxide wafer, and place the silicon dioxide wafer with nickel nitrate upside down in the chemical vapor deposition equipment The top, with the nickel nitrate attached to the bottom of the chemical vapor deposition equipment, is sealed;
[0044] (2) Introduce 100 sccm of hydrogen gas into the chemical vapor deposition equipment for 20 minutes, and start heating after the air is exhausted;
[0045](3) After heating to 680°C, start feeding 300 sccm of ethane and keep it for 100 minutes to grow vertical graphene. After the reaction is over, stop heating, stop feeding ethane, cool to room temperature under the protection of hydrogen, and stop Hydrogen gas is introduced to obtain graphene perpendicular to the surface of the silicon dioxide sheet. Finally, th...
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