Preparation method for composite nano zirconium oxide powder and precision ceramic bearing
A nano-zirconia and composite powder technology, applied in the field of material preparation, can solve the requirements of high sintering temperature, energy consumption, strength, toughness and superplasticity of the material to meet the requirements of high-speed operation of bearings, corrosion resistance, anti-magnetic precision performance, etc. question
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[0069] The preparation method comprises the following steps:
[0070] In step S101, select zirconium rods and aluminum rods with a purity of not less than 93% to make planar sputtered zirconium palladium and aluminum palladium;
[0071] In step S102, zirconium palladium and aluminum palladium are loaded in the vacuum equipment of ion plating according to a certain quantity ratio, in vacuum state 10 -3 ~10 -5 Under Pa, pass 18000-21000 volts of high voltage electricity, when the instantaneous temperature of arc ignition reaches above 1400 ℃, fill in a certain proportion of oxygen, nitrogen, neon and argon with a flow rate of 280SCCM;
[0072] In step S103, zirconium palladium and aluminum palladium are activated into a gaseous state with an arc source to obtain a composite nanopowder, and after 20 minutes, the temperature is lowered and the pressure is released;
[0073] In step S104, liquid nitrogen is introduced into the adsorption tube to allow the gaseous powder to be ful...
Embodiment approach 1
[0130] Step 1: Select zirconium rods and aluminum rods with a purity of 93-95% to make planar sputtered zirconium palladium and aluminum palladium;
[0131] Step 2: Load zirconium palladium and aluminum palladium (according to 26: 6 targets) in the ion plating vacuum equipment, heat 400-1000 ℃ in a vacuum state for 10 -3 ~10 -5 Pa is connected to a high voltage of about 18000-21000 volts; the arc is struck to make the instantaneous temperature reach about 1400-1680 ℃, and the flow rate is filled with oxygen, nitrogen, neon and argon (ratio 60:30:5:5 parts). 280SCCM, at the same time use arc source to intensify zirconium palladium and aluminum palladium into gas state to make composite nanopowder, after about 20 minutes, cool down and release pressure;
[0132] Step 3: Introduce liquid nitrogen into the adsorption tube, let the gaseous powder fully adsorb on the adsorption tube, wait for 60-80 ℃, open the warehouse door and scrape off the powder with a scraper, that is, zircon...
Embodiment approach 2
[0157] Step 1: Select 94-96% pure zirconium rods and aluminum rods to make planar sputtered zirconium palladium and aluminum palladium;
[0158] Step 2: Load zirconium palladium and aluminum palladium (according to 28: 4 targets) in the ion plating vacuum equipment, heat 400-1100 ℃ in a vacuum state for 10 -3 ~10 -5 Pa high voltage is about 18000-21000 volts; the arc is struck to make the instantaneous temperature reach about 1500-1750 ℃, and the flow rate is filled with oxygen, nitrogen, neon and argon (ratio 70:20:5:5). 280SCCM, at the same time use arc source to intensify zirconium palladium and aluminum palladium into gas state to make composite nanopowder, after about 20 minutes, cool down and release pressure;
[0159] Step 3: Introduce liquid nitrogen into the adsorption tube, let the gaseous powder fully adsorb on the adsorption tube, wait for 70-90 ℃, open the door and scrape off the powder with a scraper, that is, zirconium oxide ZrO 2 , zirconium nitride ZrN, sili...
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