The invention discloses a bias
voltage introduction and vacuum
ionization prevention all-dimensional
coating tool, and belongs to the technical field of
vacuum coating. The tool is mainly composed of a track, a walking mechanism, a planetary workpiece
disc assembly, a bias
voltage wiring and leading-in mechanism and the like, and the core of the tool is that bias
voltage output by a bias voltage power supply can be safely applied to a sample to be plated which is completely isolated from a grounded
vacuum chamber in an atmospheric state. Through multiple insulation designs (such as an insulation sleeve and a
ceramic bearing), reliable insulation between key components such as a planetary workpiece disc, a fixed rod and a self-rotating rod and a cavity is realized, and vacuum
ionization sparking is effectively prevented. The bias voltage is finally applied to the sample through a series of transmission of the bias voltage wiring
assembly, the entering mechanism, the introducing autorotation rod mechanism and the like. The traveling mechanism enables the tool to enter and exit the cavity along the track, and bias connection can be automatically switched on and off along with the traveling mechanism. In addition, the planetary workpiece disc adopts a wear-resistant and high-temperature-resistant full-bead bearing steel
thrust bearing, so that the height of revolution and rotation parts is reduced, and the
utilization rate of a
coating space is improved. The
coating quality and the
automation degree are improved, and high reliability and large
load capacity are achieved.