Device and method for detecting nitrogen trifluoride

A nitrogen trifluoride and nitrogen dioxide technology, which is applied in the field of devices for detecting nitrogen trifluoride, can solve the problems of insufficient overall performance of the instrument, unsatisfactory test results, complex decomposition products, etc., and achieves long service life and detection limit. Low, maneuverable effects

Inactive Publication Date: 2014-02-12
邯郸派瑞节能控制技术有限公司
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Problems solved by technology

However, at present, the foreign nitrogen trifluoride analysis instruments developed using this principle (there is no such instrument in China), all use catalysts in thermal cracking without exception. Although this method realizes nitrogen trifluoride at a lower temperature However, due to the use

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  • Device and method for detecting nitrogen trifluoride

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Embodiment Construction

[0010] Such as figure 1 As shown, a device for detecting nitrogen trifluoride includes a high-temperature cracking furnace, a selective filter, a conversion tube, a nitrogen dioxide sensor gas chamber and an air pump, and the high-temperature cracking furnace, a selective filter, and a conversion tube , the nitrogen dioxide sensor and the suction pump are connected through pipelines in turn; there is a conversion agent in the conversion tube, and a nitrogen dioxide sensor in the gas chamber of the nitrogen dioxide sensor.

[0011] The main components of the conversion agent can be oxidants such as MnO2, FeCl3 and KMnO4.

[0012] There is a temperature sensor in the high temperature cracking furnace.

[0013] The working temperature of the high temperature cracking furnace is 600-1100°C.

[0014] The working gas flow rate of the high temperature cracking furnace is 5mL / min-500mL / min.

[0015] The measurement range of the nitrogen dioxide sensor is 1 ppm to 200 ppm.

[0016]...

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Abstract

The invention relates to a device and method for detecting nitrogen trifluoride. The device for detecting nitrogen trifluoride comprises a high-temperature cracking furnace, a conversion pipe, a nitrogen dioxide sensor air chamber and an air extracting pump, wherein the high-temperature cracking furnace, a selective filter, the conversion pipe, a nitrogen dioxide sensor and the air extracting pump are sequentially connected through a pipe; a conversion agent is contained in the conversion pipe; and the nitrogen dioxide sensor is arranged in the nitrogen dioxide sensor air chamber. The method for detecting nitrogen trifluoride comprises the steps of (1) introducing air mixed with nitrogen trifluoride into the high-temperature cracking furnace, implementing cracking reaction, and cooling generated gas in a pipeline; (2) converting nitric oxide into nitrogen dioxide through the conversion agent in the conversion pipe; (3) detecting by the nitrogen dioxide sensor and outputting an electric signal; and (4) calculating concentration of the nitrogen trifluoride according to the detected electric signal and air inflow of the high-temperature cracking furnace in the step (1). The device is little in interference gas, does not use catalysts and is low in cost.

Description

technical field [0001] The invention belongs to the field of nitrogen trifluoride detection, in particular to a device and method for detecting nitrogen trifluoride. Background technique [0002] Nitrogen trifluoride is an industrial special gas, mainly used as propellant (rocket), fluorinating agent, electron gas, plasma etching and for doping, laser, optical fiber, etc. Especially as an excellent plasma etching gas, it is widely used in today's rapidly developing microelectronics field. At the same time, nitrogen trifluoride is a toxic substance with strong oxidizing properties, and can react strongly with reducing agents, causing combustion and explosion. Therefore, the leak analysis and detection of nitrogen trifluoride is not only the need of production safety, but also the need of environmental protection. At present, catalytic thermal cracking + electrochemical method is a good method for analyzing nitrogen trifluoride. This method uses catalytic and high temperatur...

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Application Information

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IPC IPC(8): G01N35/00G01N1/28
Inventor 杨震夏杜海波田亮亮王祥滨王国庆苗英俊刘耀中张学谦陈长江牛巧云王亮
Owner 邯郸派瑞节能控制技术有限公司
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