Production method for mask plate

Abstract

The invention discloses a production method for a mask plate. The production method comprises the following steps: sticking a film on a core mould; exposing; carrying out developing; electroplating; and carrying out post-treatment. The production method is characterized in that the thickness of an electroplating layer is greater than that of the film in the step of sticking the film on the core mould; the electroplating layer corresponds to a body of the mask plate. According to the mask plate produced by the method disclosed by the invention, an evaporation hole is provided with a groove region on an ITO (Indium Tin Oxide) surface; the edge line of the evaporation hole in an evaporation surface is in an outwards-extending type trumpet shape on the section on which the central axis of the evaporation hole is positioned, and an included angle being 30-60 degrees is formed between a hole wall of the evaporation hole in the evaporation surface and a plate surface of the mask plate body so that the area of shielding on an evaporation material caused by the hole wall of the evaporation hole in the evaporation process can be reduced; the evaporation hole is provided with the groove region on the ITO surface so as to prevent the edge of the evaporation hole in the mask plate from being raised to avoid scratching a deposited base plate, and furthermore, the quality of a display is improved; meanwhile, the production method is used for producing the mask plate and can be used for enabling the evaporation hole with the small size to be smallest.

Description

technical field [0001] The invention relates to a method for manufacturing a mask, in particular to a method for manufacturing a mask for OLED evaporation. Background technique [0002] Organic Light-Emitting Diode (OLED) displays have a series of advantages such as self-illumination, low-voltage DC drive, full curing, wide viewing angle, and rich colors. Compared with liquid crystal displays, OLED displays do not require a backlight source, and the viewing angle Large, low power, its response speed can reach 1000 times that of LCD, but its manufacturing cost is lower than that of LCD with the same resolution. Therefore, OLED displays have broad application prospects and will gradually become the fastest growing new display technology in the next 20 years. [0003] The production of the organic layer material in the OLED structure requires the use of a mask for evaporation. Traditionally, the mask is made by etching. Before evaporation, the mask needs to be fixed on the...

AI Technical Summary

Problems solved by technology

The schematic diagram of the cross-section of the evaporation hole of the mask plate is shown in figure 1 As shown, 1 is the ITO surface of the mask (that is, the side in contact with the deposition substrate), 2 is the evaporation surface of the mask (that is, the side facing the evaporation source), 11 is the evaporation hole of the mask, and the evaporation hole The cross section of 11 is gourd-shaped. Since the edge of the evaporation hole 11 is relatively thin, the edge of the evaporation hole is easy to lift after the mask has a certain tension, such as figure 1 As shown by the raised part 12 in , the raised part 12 at the edge of the evaporation hole will scratch the deposition substrate during the evaporation process, thereby affecting the quality of the display, and the size of the evaporation hole of the mask made by the etching process is not good. control, especially when making small-sized vapor-deposition holes, it is difficult to make the size of the vapor-deposition holes smaller

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