(Pb, Bi) (Ni, Zr, Ti)O3 solid solution ferroelectric film with both high voltage constant and high stored energy density and preparation method thereof

Abstract

The invention belongs to the field of electronic functional materials and devices, and particularly relates to a (Pb, Bi) (Ni, Zr, Ti)O3 solid solution ferroelectric film with both high voltage constant and high stored energy density and a preparation method thereof. The film belongs to Bi-system ferroelectric compound solid solution and is shown as the following chemical general formula: (Pb[1-x]Bix)(Nix / 2Zrx / 2Ti[1-x])O3, belonging to perovskite structure, wherein x is greater than 0 and less than 0.5. The preparation method comprises steps of weighing all the raw materials for preparation by the stoichiometric ratio according to the chemical general formula, depositing on a substrate so as to form the ferroelectric film with compact structure and homogeneous components. The film has excellent dielectric, ferroelectric and piezoelectric properties, particularly, very high breakdown field strength and stored energy density. Compared with the stored energy density of the existing capacitors in market, the stored energy density of the (Pb, Bi) (Ni, Zr, Ti)O3 solid solution ferroelectric film is higher by one order of magnitudes, so that the (Pb, Bi) (Ni, Zr, Ti)O3 solid solution ferroelectric film has great potential application prospect in piezoelectric devices and high power and high-capacity capacitors; more importantly, for both high voltage constant and high stored energy density, the (Pb, Bi) (Ni, Zr, Ti)O3 solid solution ferroelectric film can be used as the key material for collecting and storing piezoelectric energy.

Description

Technical field [0001] The invention belongs to the field of electronic functional materials and devices, and in particular relates to a (Pb, Bi) (Ni, Zr, Ti) O with both high voltage electric constant and high energy storage density 3 Solid solution ferroelectric thin film and preparation method thereof. Background technique [0002] Piezoelectric materials are widely used in communications, household appliances, aviation, detection, computers and many other fields, such as piezoelectric energy harvesting, piezoelectric transducers, surface acoustic wave devices, pressure sensors, drivers and other devices. Piezoelectric ceramics account for as much as 1 / 3 of the entire functional ceramics world, and have become important functional materials in national defense and civil industries and daily life. Especially with the rapid development of microelectronics technology, micro power supplies based on piezoelectric effect power generation have very broad application prospects in the ...

AI Technical Summary

Problems solved by technology

However, although traditional piezoelectric materials (such as PZT, etc.) currently on the market have high piezoelectric constants, they cannot be used as high energy storage circuit components due to their low breakdown electric field and low energy storage density; Although many ferroelectric polymers (such as PVDF) and antiferroelectric materials have high energy storage density, their piezoelectric performance is very poor. If they are used as piezoelectric power generation devices, their piezoelectric conversion efficiency will be very low.

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