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Iron/platinum/carbon sputtering target

A sputtering target, fe100-x-ptx technology, applied in the field of sputtering targets, can solve the problems of reduced magnetic properties and no record of countermeasures, etc., and achieves the effects of easy ordering and excellent corrosion resistance

Active Publication Date: 2014-04-09
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, generally speaking, if a sputtering device is used to sputter a composite sputtering target containing an alloy and a non-magnetic material, there will be the following problem: the non-magnetic material is accidentally detached during sputtering and becomes a powder ( Dust adhering to the substrate)
However, regarding measures to reduce the amount of gas components in the target, only Fe ingots with low impurities and low gas components are used, and no specific measures are described.
In addition, C is not considered to be preferable because the ordering temperature of the magnetic alloy film increases and the magnetic properties decrease.

Method used

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  • Iron/platinum/carbon sputtering target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, and C powder with an average particle diameter of 1 μm were prepared. As C powder, commercially available amorphous carbon was used.

[0061] These powders were weighed so that the total weight would be 2600 g according to the following atomic ratios.

[0062] Atomic ratio: (Fe 50 -Pt 50 ) 60 -C 40

[0063] Next, the weighed powder was enclosed in a ball mill pot with a capacity of 10 liters together with zirconia balls as a grinding medium, and it was rotated for 4 hours to perform mixing and grinding. Then, heat treatment is performed on the mixed powder taken out from the ball mill.

[0064] The heat treatment conditions were set to be an Ar atmosphere (atmospheric pressure), a heating rate of 300° C. / hour, a holding temperature of 900° C., and a holding time of 2 hours. After natural cooling, the powder was taken out from the heat...

Embodiment 2

[0078] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, Cu powder with an average particle diameter of 3 μm, and C powder with an average particle diameter of 1 μm were prepared. As C powder, commercially available amorphous carbon was used.

[0079] These powders were weighed so that the total weight would be 2380 g according to the following atomic ratios.

[0080] Atomic ratio: (Fe 40 -Pt 45 -Cu 15 ) 55 -C 45

[0081] Next, the weighed powder was enclosed in a ball mill pot with a capacity of 10 liters together with zirconia balls as a grinding medium, and it was rotated for 4 hours to perform mixing and grinding. Then, heat treatment is performed on the mixed powder taken out from the ball mill.

[0082] The heat treatment conditions were set to be an Ar atmosphere (atmospheric pressure), a heating rate of 300° C. / hour, a holding temperature of 800° C., and a holding time of 2 hours. ...

Embodiment 3

[0096] As raw material powders, Fe powder with an average particle diameter of 3 μm, Pt powder with an average particle diameter of 3 μm, Ag powder with an average particle diameter of 1 μm, and C powder with an average particle diameter of 1 μm were prepared. As C powder, commercially available amorphous carbon was used.

[0097] These powders were weighed so that the total weight would be 2200 g in accordance with the following atomic ratios.

[0098] Atomic ratio: (Fe 42.5 -Pt 42.5 -Ag 15 ) 60 -C 40

[0099] Next, the weighed powder was enclosed in a ball mill pot with a capacity of 10 liters together with zirconia balls as a grinding medium, and it was rotated for 4 hours to perform mixing and grinding. Then, heat treatment is performed on the mixed powder taken out from the ball mill.

[0100] The heat treatment conditions were set to be an Ar atmosphere (atmospheric pressure), a heating rate of 300° C. / hour, a holding temperature of 850° C., and a holding time of ...

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Abstract

A sintered sputtering target, the composition of which, in terms of atomic ratio, is represented by the formula (Fe100-X-PtX)100-ACA, with A and X satisfying the relations 20 <= A <= 50 and 35 <= X <= 55. Said sputtering target is characterized by carbon particles finely dispersed in a base alloy and an oxygen content of 300 wt ppm or less. The present invention addresses the problem of providing an iron / platinum sputtering target that allows the production of a highly corrosion-resistant magnetic thin film having a granular structure, has finely dispersed carbon particles that make it easy to create ordered L10 structures, and has a low oxygen content.

Description

technical field [0001] The present invention relates to a sputtering target used for forming a granular magnetic thin film in a magnetic recording medium, and to an Fe—Pt type sputtering target in which C particles are dispersed in a base material alloy. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on ferromagnetic metals Co, Fe, or Ni are used as materials for magnetic thin films in magnetic recording media. For example, a Co—Cr—Pt type ferromagnetic alloy containing Co as a main component has been used as a magnetic thin film of a hard disk employing an in-plane magnetic recording method. In addition, the magnetic thin film of the hard disk adopting the perpendicular magnetic recording method put into practical use in recent years often uses a composite material including a Co—Cr—Pt type ferromagnetic alloy mainly composed of Co and a nonmagnetic material. Furthermore, from the viewpoint of high producti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C04B35/56G11B5/851
CPCG11B5/851B22F2998/10C23C14/3414B22F2999/00C22C32/0084C23C14/165C22C33/0278B22F1/142B22F2201/10B22F2201/20B22F1/09B22F1/12B22F3/14B22F3/15B22F1/10
Inventor 佐藤敦
Owner JX NIPPON MINING & METALS CORP