Micro mechanical sensor with two layers of base plates

A technology of micromechanical sensors and substrates, which is applied in the direction of instruments, piezoelectric effect/electrostrictive or magnetostrictive motors, optical waveguide coupling, etc. Measure the impact and other issues to achieve the effect of easy control of process quality, low cost and reduced volume

Inactive Publication Date: 2014-04-23
NANJING UNIV OF INFORMATION SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatible with microelectronics processes
Instruments based on optical principles are also easily affected by the surrounding environment, such as dust blocking the lens, which will affect the measurement

Method used

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  • Micro mechanical sensor with two layers of base plates

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing, the technical scheme of invention is described in detail:

[0020] Such as figure 1 The shown micromechanical sensor with a two-layer substrate includes: a first substrate made of a single crystal silicon wafer

[0021] Board 101, second substrate 201, the second substrate 201 is the base of the micromechanical sensor with two-layer substrate, the first substrate 101 is placed on the second substrate 201 and connected with the second substrate 201, wherein,

[0022] The first substrate 101 is processed by the MEMS process to obtain a first cavity 103 with an upward opening and a second cavity 104 with a downward opening. The part of the first substrate between the first cavity 103 and the second cavity 104 constitutes the first film. sheet 102,

[0023] The second substrate 201 is processed by a MEMS process to obtain a third cavity 202 with an upward opening and a fourth cavity 203 with a downward opening. The part of t...

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Abstract

The invention discloses a micro mechanical sensor with two layers of base plates, and belongs to the technical field of micro mechanical sensors. The sensor comprises the two layers of base plates, a second cavity, a third cavity and a through hole, wherein the base plates are made of monocrystalline silicon wafers, the base plates, the second cavity, the third cavity and the through hole form a unique path for gas circulation, a measuring resistor and a heating resistor are arranged in a narrowest position in the gas circulation path, and the gas flowing speed is accelerated. The micro mechanical sensor has the advantages that an MEMS (micro-electromechanical system) processing process is adopted, the size of the sensor is reduced, and the micro mechanical sensor can be used for measuring precipitation particles.

Description

technical field [0001] The invention discloses a micromechanical sensor with a two-layer substrate, which belongs to the technical field of micromechanical sensors. Background technique [0002] Measuring precipitation is an important part of meteorological measurements. Traditional methods of measuring precipitation mainly use tipping bucket or cylinder rain gauges. However, there is a wetting error in the traditional rain gauge. When there are only a few precipitation particles, the wetting error may make the instrument unable to detect the precipitation particles. At the same time, traditional rain gauges cannot measure the mass of raindrops, nor can they distinguish raindrops from hail. [0003] The current raindrop spectrometer based on the principle of optical scattering can measure the quality of raindrops and avoid infiltration errors. However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatible ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02B81B7/02
Inventor 刘清惓李海涛郭薇王勋涛
Owner NANJING UNIV OF INFORMATION SCI & TECH
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