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System for improving PD (phase diversity) wave-front sensing performance

A technology of wavefront sensing and phase difference, applied in the optical field, can solve problems such as small dynamic range, failure of PD technology, impact on calculation accuracy, etc., achieve the effect of reducing relative position accuracy, reducing relative position accuracy requirements, and improving overall performance

Inactive Publication Date: 2014-04-23
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, this technique also has its disadvantages:
[0019] First, the dynamic range measured by classical PD technology is relatively small, and generally it can only be applied to high-precision inversion under small aberration conditions
If there is a large wavefront distortion in the system, the calculation accuracy of PD will be seriously affected
Therefore, the traditional PD technology cannot completely replace other wavefront sensing methods, and usually starts to play the role of high-precision detection after the traditional method has completed large-scale coarse-precision detection in a cascaded manner.
[0020] Second, existing studies have shown that classical PD technology requires that the relative defocus intensity introduced between positive defocus images cannot exceed 1 wavelength, which puts high demands on the optical components used to generate defocus. At the same time, the relative position accuracy of the focal plane of the positive focus optical path and the focal plane of the defocus optical path is strictly limited, because if the deviation of the relative position accuracy between the focal planes of the positive defocus imaging optical path exceeds 1 wavelength, then the PD technology will facing the possibility of failure

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  • System for improving PD (phase diversity) wave-front sensing performance
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Embodiment Construction

[0038] The reason why the traditional PD technology can only calculate the wavefront Zernike coefficient with high precision in a very limited dynamic range is because the optimization of the traditional imaging system is based on the premise that the diffraction is limited, so its final performance has a great influence on the wavefront of the system. Distortion changes are often very sensitive. Therefore, if the system has large aberrations, so that the spectral information of the in-focus or out-of-focus image is excessively degraded, then the global optimization of equation (6) may not converge to a meaningful solution. In order to improve the dynamic range of PD technology, the most direct idea is to add an artificial disturbance to the system, which can make the system insensitive to large aberrations, so that it is possible to expand the dynamic range of PD wavefront inversion.

[0039]As a technology that can effectively extend the depth of field of an optical system, ...

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Abstract

The invention relates to a system for improving PD (phase diversity) wave-front sensing performance. The system comprises wave-front coding lens, a light splitting element, an in-focus image focal plane CCD (charge-coupled device) camera, an optical element which can be out of focus, an out-of-focus image focal plane CCD camera and a digital processing unit, wherein the wave-front coding lens and the light splitting element are arranged on the same light path; the light splitting element is used for splitting light incident into the light splitting element into reflected light and transmitted light; the in-focus image focal plane CCD camera is arranged on a light path where the transmitted light generated through the light splitting element is located; the optical element which can be out of focus and the out-of-focus image focal plane CCD camera are sequentially arranged on a light path where the reflected light generated through the light splitting element is located; the in-focus image focal plane CCD camera and the out-of-focus image focal plane CCD camera are connected with the digital processing unit respectively. According to the system for improving the PD wave-front sensing performance, the performance of a PD technology can be greatly improved, and the application fields of the PD technology are expanded.

Description

technical field [0001] The invention belongs to the field of optics and relates to a system for improving the performance of phase difference wavefront sensing. Background technique [0002] An adaptive optics system usually consists of three parts: a wavefront sensor, a wavefront corrector, and a wavefront controller. Among them, the wavefront sensor shoulders the important task of obtaining the optical wavefront distortion of the system, and is the input end of the entire adaptive optics system. Commonly used wavefront sensing technologies today include: shearing interferometers, curvature sensors, pyramidal mirror sensors, and Shack-Hartmann sensors. These techniques all require the introduction of special hardware, and some of them can only implement wavefront inversion calculations for point light sources, so they are limited in the breadth of application. At present, a new wavefront sensing technology based on image processing has become a research hotspot at home an...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/00
Inventor 赵惠易红伟樊学武
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI