System for improving PD (phase diversity) wave-front sensing performance
A technology of wavefront sensing and phase difference, applied in the optical field, can solve problems such as small dynamic range, failure of PD technology, impact on calculation accuracy, etc., achieve the effect of reducing relative position accuracy, reducing relative position accuracy requirements, and improving overall performance
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[0038] The reason why the traditional PD technology can only calculate the wavefront Zernike coefficient with high precision in a very limited dynamic range is because the optimization of the traditional imaging system is based on the premise that the diffraction is limited, so its final performance has a great influence on the wavefront of the system. Distortion changes are often very sensitive. Therefore, if the system has large aberrations, so that the spectral information of the in-focus or out-of-focus image is excessively degraded, then the global optimization of equation (6) may not converge to a meaningful solution. In order to improve the dynamic range of PD technology, the most direct idea is to add an artificial disturbance to the system, which can make the system insensitive to large aberrations, so that it is possible to expand the dynamic range of PD wavefront inversion.
[0039]As a technology that can effectively extend the depth of field of an optical system, ...
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