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One-time splicing measurement device of large-aperture optical element profile

An optical element and measuring device technology, which is applied in the field of one-time splicing measuring devices for the outline of large-diameter optical elements, and achieves the effects of small roughness value, stable accuracy and reduction of measuring steps.

Active Publication Date: 2014-05-28
XIAMEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problems existing in the measurement of large-aperture optical elements by existing coordinate measuring equipment, and to provide a one-time splicing measurement of the profile of the large-aperture optical element that can obtain the surface profile of the large-aperture optical element through one splicing measurement device

Method used

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  • One-time splicing measurement device of large-aperture optical element profile
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  • One-time splicing measurement device of large-aperture optical element profile

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Embodiment Construction

[0022] The following embodiments will further illustrate the present invention in conjunction with the accompanying drawings.

[0023] The embodiment of the present invention is provided with a Y-axis linear motor 1, a Y-axis linear guide rail 2, a base 3, a motion controller 4, a column 5, a beam 6, a measuring sensor 7, a linear motion screw nut pair 8, a shaft coupling 9, a measuring Head movement drive motor 10, Z-axis linear guide rail 11, Z-axis linear motor 12, probe connection seat 13, Z-axis worktable 14, X-axis worktable 15, X-axis linear guide rail 16, X-axis linear motor 17, workpiece 18 , the workpiece turntable 19, the connection seat 20, the rotating motor 21, the Y-axis table 22 and the computer 23.

[0024] The Y-axis linear motor 1 and the Y-axis linear guide rail 2 are set on the base 3, and the column 5 is located on the base 3 to support the beam 6, and the X-axis workbench 15 is fixed on the beam 6 and driven by the X-axis linear motor 17 , the X-axis li...

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Abstract

The invention provides a one-time splicing measurement device of a large-aperture optical element profile, relating to a measurement device of an optical element profile. The one-time splicing measurement device is provided with a Y-axis linear motor, Y-axis linear guide rails, a base, a movement controller, a stand column, a cross beam, a measurement sensor, a linear motion lead screw nut pair, a coupling, a measuring head movement driving motor, Z-axis linear guide rails, a Z-axis linear motor, a measuring head connecting base, a Z-axis workbench, an X-axis workbench, X-axis linear guide rails, an X-axis linear motor, a workpiece, a workpiece rotary table, a connecting base, a rotary motor, a Y-axis workbench and a computer. The one-time splicing measurement device can realize one-time splicing measurement; particularly specific to a large-aperture workpiece, measurement steps are reduced by adopting the measurement device; the one-time splicing measurement device is simple in measurement process, high in measurement efficiency, simple and compact in structure and convenient to operate.

Description

technical field [0001] The invention relates to a device for measuring the profile of an optical element, in particular to a device for once splicing the profile of a large-diameter optical element. Background technique [0002] In recent years, with the development of optoelectronics and advanced manufacturing technology, the application of optical components in military and civilian products has become more and more popular, especially the large-aperture aspheric optical components have the ability to correct aberrations, increase the relative aperture of the system, and expand the field of view. Angle, simplified system structure, reduced weight, reduced volume and other superior properties, are widely used in astronomical optical systems, medical systems, thermonuclear fusion, large telescopes, and powerful laser weapon systems. [0003] With the development of computer control technology, the detection process of optical components has also been greatly promoted. The m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
Inventor 郭隐彪李欣杨旭张艳婷王振忠
Owner XIAMEN UNIV
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