Dual-way growth type carbon nano tube array sensor and preparation method of dual-way growth type carbon nano tube array sensor

A carbon nanotube array and carbon nanotube technology, applied in the direction of material resistance, etc., can solve the problem of gas cannot be adsorbed, and achieve the effect of improved repeatability and excellent electrical contact performance
CN103837583AActive Publication Date: 2014-06-04UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Publication Date
2014-06-04

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Abstract

The invention discloses a dual-way growth type carbon nano tube array sensor and a preparation method of the dual-way growth type carbon nano tube array sensor. The dual-way growth type carbon nano tube array sensor comprises a bottom electrode, carbon nano tubes and a top electrode and is of a three-dimensional structure, wherein the carbon nano tubes are perpendicular to the growth of the bottom electrode, and one ends of the carbon nano tubes are connected in the bottom electrode; the carbon nano tubes are perpendicular to the top electrode in the growing process, and the other ends of the carbon nano tubes are electrically contacted with the top electrode. The dual-way growth type carbon nano tube array sensor and the preparation method of the dual-way growth type carbon nano tube array sensor have the advantages that the gas-sensitivity is good, an electrical contacting property is good, the stability and the preparative repeatability are high, and an integrated form array sensor for multiple gases is easy to realize.
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Description

technical field

[0001] The invention relates to a device and a preparation method of a carbon nanotube gas sensor, in particular to a bidirectional growth type carbon nanotube array sensor and a preparation method thereof. Background technique

[0002] As a key link in automatic detection and automatic control, sensors are widely used in many fields in the economy and society. With the improvement of living standards and environmental protection awareness, there is a higher demand for the monitoring of industrial waste gas and atmosphere, as well as the detection of food and living environment quality, and the role of sensors is becoming more and more important. Traditional metal-oxide-semiconductor gas sensors cannot work at room temperature, consume a lot of energy with high power, are usually large in size, not high in portability, and inconvenient to use. In contrast, carbon nanotube sensors use a new type of one-dimensional material - carbon nanotubes, which have a str...

Claims

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