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Fluororesin molded article

A molded product, a technology of fluororesin, applied in the field of container-shaped articles, can solve problems such as bad cost, reduction effect, and low production efficiency, and achieve shortened production efficiency, excellent heat resistance and chemical resistance, and excellent dimensional accuracy Effect

Active Publication Date: 2014-06-04
DUPONT MITSUI FLUOROCHEMICALS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for example, in the case of obtaining the above-mentioned treatment tank and the like by rotational molding, since the desired high dimensional accuracy is not satisfied, many additional steps are caused, so there are problems of poor cost reduction effect and low production efficiency

Method used

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  • Fluororesin molded article
  • Fluororesin molded article
  • Fluororesin molded article

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1 and 2

[0118] (Examples 1 and 2, Comparative Examples 1 and 2)

[0119] The resins and mixing ratios shown in Table 2 were used, and injection molded articles were obtained under the molding conditions described in the same table.

[0120] The injection moldability, releasability (release property), crack resistance and dimensional stability of the obtained injection molded articles were measured. The results are shown in Table 2.

[0121] Table 2

[0122]

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PUM

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Abstract

Provided is a large-size injection molded article which is obtained by injection molding a composition that contains a thermofusible fluororesin. Specifically provided is a large-size injection molded article which can be molded at a lower injection pressure in comparison to conventional PFAs and is obtained by molding a composition that has excellent releasability from a mold. This large-size injection molded article exhibits especially excellent heat resistance and chemical resistance for applications in substrate processing apparatuses, while having excellent dimensional accuracy. Provided is an injection molded article which is obtained by injection molding a composition that contains a thermofusible fluororesin and has a projected area of 1,100 cm2 or more in the injection direction. In a preferred embodiment, the composition that contains a thermofusible fluororesin is a composition that contains a melt moldable tetrafluoroethylene / fluoroalkoxy trifluoroethylene copolymer having an MFR of more than 60 g / 10 minutes.

Description

technical field [0001] The present invention relates to a method suitable for cleaning a substrate by supplying a treatment liquid or an inert gas to a substrate such as a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disc (hereinafter may be simply referred to as a "substrate") Injection molded products (container-like articles) of substrate processing equipment. In particular, the present invention relates to a container-like article obtained by injection molding a composition comprising a tetrafluoroethylene / fluoroalkoxytrifluoroethylene copolymer. Background technique [0002] In the manufacturing steps of electronic substrates such as semiconductor manufacturing equipment and liquid crystal manufacturing equipment, organic residues such as photoresist residues, organic solvent residues, synthetic waxes, and fatty acids derived from the human body, such as sodium, potassium, ...

Claims

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Application Information

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IPC IPC(8): B29C45/00C08L27/12H01L21/304B29K27/12
CPCB29K2027/12B29C45/0025H01L21/6719C08L27/12B29K2995/0058C08L27/18B29C45/00B29C45/0001C08F14/26C08L2205/025C08L2205/14B29L2031/7126Y10T428/139Y10T428/1397Y10T428/1379Y10T428/1352Y10T428/1372B32B1/00
Inventor 须田隆英西尾孝夫山本健太森谷勇斗富泽建雄饭田虎男二本木孝至
Owner DUPONT MITSUI FLUOROCHEMICALS CO LTD