Application of organic phosphate surfactant in self-stopping polishing

Abstract

The invention provides an application of an organic phosphate surfactant in self-stopping polishing. The organic phosphate surfactant has the advantages of maintenance of a high copper removal rate, improvement of the saucerization and the over polishing window of polished copper wires, few pollutants on the surface of polished copper, no corrosion and the like.

Description

technical field [0001] The invention relates to the application of a phosphate ester surfactant in self-stop polishing. Background technique [0002] With the development of semiconductor technology and the miniaturization of electronic components, an integrated circuit contains millions of transistors. In the process of operation, after integrating such a large number of transistors that can switch quickly, the traditional aluminum or aluminum alloy interconnection wires reduce the speed of signal transmission, and consume a lot of energy in the process of current transmission. In a certain sense, It also hinders the development of semiconductor technology. For further development, people began to look for materials with higher electrical properties to replace the use of aluminum. As we all know, copper has low resistance and good conductivity, which speeds up the transmission speed of signals between transistors in the circuit, and also provides smaller parasitic capacit...

AI Technical Summary

Problems solved by technology

The above-mentioned phosphate ester surfactant can maintain a high copper removal rate, improve the dish-shaped depression and over-polishing window of the copper wire after polishing, and the copper surface after polishing has less pollutants and no defects such as corrosion

Images