The invention discloses an ultra-
low oxygen content pure
copper thick plate for magnetron
sputtering coating and a preparation method thereof, the ultra-
low oxygen content pure
copper thick plate for magnetron
sputtering coating comprises the following components in percentage by weight: greater than or equal to 99.997% of Cu, 1-3 ppm of O, less than or equal to 5 ppm of Fe, less than or equal to 5 ppm of P, and the balance of inevitable
impurity elements; during preparation, firstly, a pure
copper thick plate is baked and then fed into a
smelting furnace to be smelted,
impurity elements and
hydrogen in molten copper are removed in an
oxygen hydrogen inhibition and oxidation mode, then
charcoal covering and bottom blowing of
carbon monoxide are adopted for
oxygen removal, then heat preservation furnace refining and vertical all-
continuous casting are conducted, and finally 12-pass rolling is conducted on a hot
rolling mill. By accurately controlling the
heating temperature, the heat preservation time, the rolling pass and the deformation amount, the grain size, uniformity and surface quality of a final product are ensured, internal defects are reduced, the prepared pure copper thick plate has the extremely
high copper content and the extremely
low oxygen content, and important material support is provided for industry development.