Airflow control device for decouple reaction ion etching equipment
A gas flow control device and reactive ion etching technology, which is applied in the directions of crystal growth, post-processing details, and post-processing, can solve the problems of reduced service life of the chamber, reduced service life of the chamber, and increased maintenance costs, and achieve environmental maintenance. Consistent, improved stability, and stabilized stress performance effects
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[0029] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0030] In this example, first pass figure 1 , 2 Describe the state of the art. see figure 1 , figure 1 It is a structural schematic diagram of a cavity part of a DRIE device of AMEC in the prior art. As shown in the figure, the upper part of the chamber of the device is divided into left and right chambers 1 and 4 which are independent of each other, and two wafers 2 and 3 are respectively placed in the left and right chambers and separated from each other. The two chambers are completely independent, and are only connected through the common exhaust port 6 arranged in the middle of the bottom 5 of the chamber. A servo pressure valve is provided below the exhaust port to adjust the pressure in the chamber; the exhaust pipe 8 of the exhaust system is connected to the lower part of the valve 7 . The arrows in the figure represen...
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