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Preparation method of multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment

A thin film preparation and pre-crystallization technology, which is applied in the preparation of barium strontium titanate (BST) thin film and multi-layer BST thin film, can solve the problems of complex process, low tuning rate, and many process parameters, and achieve simplified process , stable frequency characteristics, small grain gap effect

Inactive Publication Date: 2014-06-25
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, binary gradient doping involves many process parameters and complicated process, which reduces the dielectric constant and makes the tuning rate low. Therefore, binary gradient doping also needs innovation to simplify the process and improve the tuning rate.

Method used

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  • Preparation method of multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment
  • Preparation method of multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment
  • Preparation method of multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment

Examples

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Comparison scheme
Effect test

Embodiment 1

[0040] Example 1 of the present invention: Gradient pre-crystallization heat treatment with ΔT=20°C and Δt=0 for 6 layers of pure Ba 0.6 Sr 0.4 TiO 3 Film Preparation

[0041] The implementation steps are as follows:

[0042] It is basically the same as the "steps of Example 2", except that the pre-crystallization heat treatment temperatures of the first to sixth layers in step (1) are 550°C, 570°C, 590°C, 610°C, 630°C, 650°C, respectively .

Embodiment 4

[0043] Example 4: Gradient pre-crystallization heat treatment with ΔT=20°C and Δt=0 for 8 layers of pure Ba 0.6 Sr 0.4 TiO 3 Film Preparation

[0044] The implementation steps are as follows:

[0045] It is basically the same as the "steps of Example 2", except that the pre-crystallization heat treatment temperatures of the first to eighth layers in step (1) are 550°C, 570°C, 590°C, 610°C, 630°C, and 650°C, respectively. , 670°C and 690°C, and the crystallization temperature in step (4) was 690°C.

Embodiment 5

[0046] Example 5: Gradient pre-crystallization heat treatment with ΔT=10°C and Δt=0 for 8 layers of pure Ba 0.6 Sr 0.4 TiO 3 Film Preparation

[0047] The implementation steps are as follows:

[0048] It is basically the same as "Steps of Example 2", except that the pre-crystallization heat treatment temperatures of the first layer to the eighth layer in step (1) are 550°C, 560°C, 570°C, 580°C, 590°C, and 600°C, respectively. , 610°C and 620°C.

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Abstract

The invention discloses a preparation method of a multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment, belonging to the technical field of functional materials. According to the preparation method, in a process of preparing a multilayer BST film by layers, the BST prepared by layers are subjected to gradient pre-crystallization heat treatment. The BST film based on the gradient pre-crystallization heat treatment has the characteristics of growth along a crystal surface (110), constant and low growth speed, average crystal grain of 20-30 nm, clear crystal boundary, small grain gap, smoothness and compactness, no cracks, no shrinkage cavity, small dielectric temperature coefficient, stable frequency characteristic, and remarkably improved comprehensive dielectric performance. A dielectric constant is 322-398, the tuning rate is 34.5-46.3 percent, the dielectric loss is 0.55-0.97 percent, the leakage current density is 4.2*10<-9>-9.0*10<-8>A / cm<2>, the dielectric temperature coefficient is 1.3*10<-3>-3.4*10<-3> / K, the high-quality factor is 42.9-76.1, and the microwave practicability of the BST film can be met.

Description

technical field [0001] The invention belongs to the technical field of functional materials, and relates to a preparation method of a barium strontium titanate (BST) film, in particular to a preparation method of a multilayer BST film. Background technique [0002] To realize microwave practicality of BST films, BST films must have low dielectric constant, stable temperature and frequency characteristics on the basis of high tuning rate, low dielectric loss, and high quality factor (ratio of tuning rate to loss). . The dielectric constant, tuning rate and dielectric loss of pure BST film are all high due to its strong ferroelectricity, and the temperature and frequency characteristics are poor, especially the dielectric loss is often more than 3%, sometimes even more than 6%, Seriously restrict the microwave application of BST films. People have carried out a lot of researches on composition optimization, structure improvement, process improvement, etc., but it is difficul...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/04C04B35/468C04B35/622
Inventor 廖家轩张未芳黄家奇徐自强尉旭波汪澎
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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