Method for manufacturing PDMS thin film integrated with sub-millimeter deep channel
A fabrication method and sub-millimeter technology are applied in the field of fabrication of integrated sub-millimeter deep channel PDMS films, which can solve problems such as inability to obtain PDMS films, and achieve the effects of low material cost, small differences, and good parallelism.
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example 1
[0053] 1. First use ArtCAM Pro software to draw as attached figure 1 For the channel pattern shown, select 2D area removal in the toolpath bar, and set the end depth to 400 μm;
[0054] 2. Set tool parameters: tool number 1, diameter 1.000mm, line spacing 0.100mm, downcutting step 0.400mm, spindle speed 4500r / min, feed rate 0.500mm / s, downcutting rate 0.200mm / s;
[0055] 3. Save the tool path as a cnc format file;
[0056] 4. Take a flat PMMA, place it under the milling cutter, adjust the height of the milling cutter so that the tip just touches the PMMA;
[0057] 5. Import the tool path file into the Amo engraving machine, click start, and the male mold engraving will start;
[0058] 6. After the engraving is finished, take out the engraved PMMA, wash off the fine particles on the surface with tap water, and dry it;
[0059] 7. Prepare liquid PDMS prepolymer, mix PDMS monomer and curing agent according to the mass ratio of 10:1;
[0060] 8. Take 1g of the above mixture an...
example 2
[0066] 1. Same as Step 1 of Example 1, set the end depth to 500 μm;
[0067] 2. Same as Step 2 of Example 1, set the down-cutting step to 0.500mm;
[0068] 3. Same as Step 3 of Example 1;
[0069] 4. Same as step 4 of Example 1;
[0070] 5. Same as Step 5 of Example 1;
[0071] 6. Same as Step 6 of Example 1;
[0072] 7. Same as Step 7 of Example 1;
[0073] 8. Same as Step 8 of Example 1;
[0074] 9. Same as Step 9 of Example 1, the number of layers of scotch tape attached is 16 layers;
[0075] 10. Same as step 10 in Example 1;
[0076] 11. Same as step 11 in Example 1.
[0077] After measurement, the channel depth of the prepared PDMS film is about 500-530 μm, and the thickness of the film is about 800-880 μm. Compared with the designed size, the error is within the acceptable range.
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