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A Low Noise and Low Loss Insulated Gate Bipolar Transistor

A bipolar transistor, low-loss technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of large gate voltage overshoot, reduced reliability, obvious device oscillation, etc., to overcome the poor noise characteristics, easy to implement , the effect of simple process design

Active Publication Date: 2016-09-21
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the existence of a floating P-type body region in this structure, a large amount of hole current will be injected from the collector to the device drift region when the device is turned on, and then flow along the device surface and under the floating P-type body region to the emitter. , this part of the current raises the potential under the gate, causing the gate capacitance of the device to be reversely charged, resulting in a large overshoot of the gate voltage and serious noise, which makes the device vibrate significantly during the switching process, reducing reliability, and seriously Its practical application is limited, so the noise problem during the switching process of IGBT devices has become the main problem in its system application. Optimizing the design of the IGBT structure to reduce the noise of the device during the turn-on process is of great significance to the development of IGBTs

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  • A Low Noise and Low Loss Insulated Gate Bipolar Transistor
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  • A Low Noise and Low Loss Insulated Gate Bipolar Transistor

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Embodiment Construction

[0017] A low-noise and low-loss insulated gate bipolar transistor, comprising a P-type collector 1, a P-type collector area 2 is provided on the P-type collector 1, and an N-type buffer layer is provided on the P-type collector area 2 3. An N-type drift region 4 is provided on the N-type buffer layer 3, and trenches with equal spacing are provided in the N-type drift region 4, and the trenches extend from the N-type drift region 4 to the N-type drift region. 4 surface, the first P-type body region 12 is provided between the outer trench and the sub-outer trench, respectively, and the first P-type body region 12 is provided on the surface of the N-type drift region 4. A second P-type body region 8 that is not in contact with the grooves on both sides of the groove is provided between all adjacent grooves inside the groove, and the second P-type body region 8 is provided on the surface of the N-type drift region 4. The top surface of the first P-type body region 12, the top surfa...

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Abstract

The invention relates to a low-noise low-loss insulated gate bipolar transistor. The low-noise low-loss insulated gate bipolar transistor comprises a P-type collector region, an N-type buffer layer, an N-type drift region, a groove gate structure, first P-type body regions, second P-type body regions, N-type emitter body regions, highly-doped N-type buried layers and emitter metal. The low-noise low-loss insulated gate bipolar transistor is characterized in that the highly-doped N-type buried layers are located below the surfaces inside the second P-type body regions. Current paths of holes are greatly improved by increasing the surface resistance of a device, displacement currents of the device in the switching process are greatly reduced, overshoot is greatly reduced, and noise is greatly lowered. Meanwhile, due to the fact that the second P-type body regions in a traditional structure are reserved, the good compromise relation between forward conduction pressure drop and turn-off losses in the traditional structure is reserved. The low-noise low-loss insulated gate bipolar transistor is simple in structure and process and easy to achieve.

Description

Technical field [0001] The present invention mainly relates to the technical field of power semiconductor devices, in particular to a low-noise and low-loss insulated gate bipolar transistor, which is particularly suitable for high-power integrated circuits such as variable frequency speed regulation, electric traction, variable frequency home appliances, half-bridge drive circuits and automobile production And other fields. Background technique [0002] Insulated Gate Bipolar Transistor (IGBT) is a representative device in the field of modern power electronics. In the thirty years since its birth to the present, its market capacity has far exceeded that of traditional rectifier devices, showing extremely strong Its vitality and development potential have become one of the current mainstream power electronic devices. It perfectly combines the fast switching speed of metal oxide semiconductor tubes and the strong current capability of bipolar transistors (Bipolar Junction Transist...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/739H01L29/06
CPCH01L29/0615H01L29/7393
Inventor 孙伟锋杨卓喻慧祝靖陆生礼时龙兴
Owner SOUTHEAST UNIV