A silicon tetrachloride purification process and system
A technology of silicon tetrachloride and process, applied in the direction of silicon halide compound, halosilane, etc., can solve the problems of poor purification effect and so on
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Embodiment 1
[0038] A fixed bed reactor is adopted, the reaction temperature is controlled at 300°C, 350°C, 400°C, 450°C, 500°C, the gas residence time is 30s, the particle size of activated alumina is 3-5mm, and the average specific surface area is 340m 2 / g, the particle size of active silica gel is 75~150μm, and the average specific surface area is 400m 2 / g, the reflux ratio of the first rectifying tower is 10: 1, the reflux ratio of the second rectifying tower is 20: 1, the tower top temperature is controlled at 56~58 ℃, and the tower bottom temperature is controlled at 70~72 ℃.
Embodiment 2
[0040] Adopt two-stage fixed-bed reactor, the temperature of the first section fixed-bed reactor is 300 ℃, the residence time 10s, the temperature of the second section fixed-bed reactor is 400 ℃, the residence time 20s, all the other parameters are the same as embodiment 1.
Embodiment 3
[0042] Two-stage fixed-bed reactors were adopted, the temperature of the first fixed-bed reactor was 350° C., and the residence time was 15 seconds. The temperature of the second-stage fixed-bed reactor was 450° C., and the residence time was 25 seconds.
[0043] Table 1 Embodiment 1~3 silicon tetrachloride purity compares
[0044]
[0045] It can be seen from the above table that the purification efficiency of the two-stage fixed-bed reactor is significantly higher than that of the one-stage fixed-bed reactor, which may be because the residence time in the one-stage fixed-bed reactor is too long, resulting in local temperature changes and reduced impurity conversion efficiency.
[0046] In the one-stage reactor, the reaction temperature of 500°C has the best impurity removal effect, indicating that the impurity and chlorine react most fully at this temperature.
[0047] In Example 3, the reaction temperature is reduced and the gas residence time is prolonged, but the impur...
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