A kind of mems semiconductor gas sensor and its manufacturing method, and gas detection method

A gas sensor and manufacturing method technology, applied in semiconductor devices, electric solid state devices, fluid velocity measurement, etc., can solve the problem of inability to respond to recovery rate, linearity, selective compensation, inability to effectively reduce adverse effects of ambient temperature, inability to Control sensor performance changes and other issues to ensure performance, reduce test errors, and improve performance

Active Publication Date: 2016-09-07
SUZHOU LEANSTAR ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method cannot control the change in the working temperature of the sensitive material of the semiconductor gas sensor caused by the change in the ambient temperature, and it cannot control the performance change of the sensor as a result.
[0005] In practical applications, only the signal of the semiconductor gas sensor affected by temperature can be compensated, that is, the zero point drift and sensitivity drift caused by the change of the ambient temperature can be compensated, but the response recovery rate and linearity caused by the change of the ambient temperature cannot be compensated. , selectivity and other performance impacts are compensated
Due to the large hysteresis of this method, it cannot effectively reduce the adverse effects of ambient temperature on the performance of the bulk gas sensor.

Method used

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  • A kind of mems semiconductor gas sensor and its manufacturing method, and gas detection method
  • A kind of mems semiconductor gas sensor and its manufacturing method, and gas detection method

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Embodiment 1

[0035] A MEMS semiconductor gas sensor, comprising a substrate 1 with a hollow portion 9, a sensing module, a control module and a temperature detection module; the sensing module is formed on the substrate 1, and the sensing module includes sequentially stacked The first insulating layer 2, the heating resistor 3, the second insulating layer 4, the test electrode 5 and the gas sensitive layer 6, wherein the first insulating layer 2 is arranged on the substrate 1 in a state of covering the hollow portion 9, The upper surface of the gas-sensitive layer 6 is exposed to the gas to be measured; the temperature detection module can be a related product with a temperature measurement function, such as a temperature sensitive resistor, a temperature sensor, etc., and the control module is selected from those with a control function. Various controllers, such as single-chip microcomputer, DSP (digital signal processor), FPGA (field programmable gate array), programmable logic controlle...

Embodiment 2

[0038] Please see attached figure 1, a MEMS semiconductor gas sensor of the present invention includes a substrate 1 having a hollow portion 9 and a sensing module, an ASIC circuit 8 and a temperature measuring resistor 7 respectively formed on the substrate 1; the sensing module includes a bottom-up The first insulating layer 2, the heating resistor 3, the second insulating layer 4, the test electrode 5 and the gas sensitive layer 6 are stacked, wherein the first insulating layer 2 is arranged on the substrate 1 in the state of covering the hollow part 9, and the gas The upper surface of the sensitive layer 6 is exposed to the gas to be measured. The temperature measuring resistor 7 , the heating resistor 3 and the testing electrode 5 communicate with the ASIC circuit 8 respectively. In this embodiment, the substrate 1 is made of silicon wafers polished on both sides and oxidized on both sides; the heating resistor 3 and the temperature measuring resistor 7 are made of plati...

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Abstract

The present invention relates to a sensor for gas detection, in particular to a MEMS semiconductor gas sensor, comprising a substrate with a hollow portion and a sensing module formed on the substrate, the sensing module comprising a first insulating layer stacked in sequence, Heating resistance, second insulation layer, test electrode and gas-sensitive layer; Described sensor also comprises control module and temperature detection module, and temperature detection module, heating resistance and test electrode are respectively connected with described control module; Temperature detection module is used for detecting The ambient temperature is fed back to the control module, and the control module adjusts the heating power of the heating resistor according to the ambient temperature, thereby controlling the temperature of the gas sensitive layer to the required working temperature. The sensor reduces or even eliminates the adverse effect on the gas sensitive layer due to ambient temperature changes, thereby ensuring the performance of the gas sensor. The invention also provides a manufacturing method of the gas sensor and a detection method based on the sensor.

Description

technical field [0001] The invention relates to a sensor for gas detection, in particular to a MEMS semiconductor gas sensor, a manufacturing method thereof, and a gas detection method. Background technique [0002] The various environments of human production, living and living are filled with various gases. The detection of gases, especially the detection of toxic, harmful, flammable and explosive gases, is an important means to ensure people's safe production, healthy living and comfortable life. Gas sensors are widely used in petroleum, petrochemical, gas, metallurgy, electric power, automobile industry, environmental sanitation, meteorological detection, medical health, smart home, information technology and other fields. Among the existing gas sensors, semiconductor gas sensors are the most widely used. [0003] With the rapid development of MEMS (Micro Electromechanical System) technology, gas sensors have also developed in the direction of miniaturization, intellige...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/14B81B7/00B81C1/00
Inventor 祁明锋张珽刘瑞沈方平丁海燕谷文
Owner SUZHOU LEANSTAR ELECTRONICS TECH
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