Fluidized bed reactor for producing trichlorosilane

A fluidized bed reactor, trichlorosilane technology, applied in the directions of halogenated silicon compounds, halogenated silanes, etc., can solve the problem of low production capacity of the fluidized bed reactor, unstable trichlorosilane yield, and inconsistent reaction temperature. Easy to control and other problems, to achieve the effects of suppressing the generation of by-product silicon tetrachloride, simple and reliable temperature control operation, reducing energy consumption and fixed investment

Inactive Publication Date: 2014-09-17
SHAANXI TIANHONG SILICON IND
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Problems solved by technology

[0004] The production capacity of this fluidized bed reactor is low, and the finger-shaped tubes in the reactor have potential safety hazards of being worn out, and the reaction temperature is not easy to control, resulting in a low conversion rate of hydrogen chloride and an unstable yield of trichlorosilane

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  • Fluidized bed reactor for producing trichlorosilane
  • Fluidized bed reactor for producing trichlorosilane

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Embodiment Construction

[0031] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific illustrations.

[0032] refer to figure 1 , a fluidized bed reactor for producing trichlorosilane, comprising:

[0033] A reactor body, the reactor body includes a gas distribution section 6 at the lower part, a reaction section 2 at the middle, and an expansion section 1 at the upper part, the gas distribution section 6 and the reaction section 2 are connected by a The inspection head 3 is fixedly connected; the gas distribution section 6, the inspection head 3, the reaction section 2 and the expansion section 1 are connected to each other;

[0034] The gas distribution section 6 includes a gas inlet pipeline, a gas distributor 4 arranged in the gas inlet pipeline, and the gas distributor 4 is used to evenly distribute the bottom hydrogen chloride and silicon ...

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Abstract

The invention discloses a fluidized bed reactor for producing trichlorosilane. The fluidized bed reactor comprises a reactor main body, wherein the reactor main body comprises a gas distribution section positioned at the lower part; the gas distribution section, a maintenance seal head, a reaction section and an expanding section are internally communicated with one another; the gas distribution section comprises a gas inlet pipeline, a gas distributor arranged in the gas inlet pipeline, and a silicon tetrachloride inlet and a hydrogen chloride inlet formed in the gas inlet pipeline; the reaction section comprises a gas reaction pipeline and a cooling water jacket coating the gas reaction pipeline; the expanding section comprises a gas synthesis pipeline and a synthesis gas outlet formed in the top of the gas synthesis pipeline; the maintenance seal head is connected with a material supply pipeline. The fluidized bed reactor for producing trichlorosilane, disclosed by the invention, can be used for improving the fluidized bed reactor, further removing potential safety hazards in the production process of trichlorosilane, improving the one-time conversion rate of hydrogen chloride, improving the production rate of trichlorosilane, and reducing the silicon consumption.

Description

technical field [0001] The invention belongs to the technical field of polysilicon production, and in particular relates to a fluidized bed reactor for producing trichlorosilane. Background technique [0002] Trichlorosilane is an important raw material in the production process of semiconductor silicon, monocrystalline silicon and polycrystalline silicon, and is widely used in the defense industry and various fields of people's daily life. [0003] At present, the existing domestic fluidized bed reactor adopts a cylindrical structure in structure, which is divided into an expansion section, a reaction section, and a bottom connection inspection head; a finger-shaped cooling pipe is added in the reactor, and heat-conducting oil is used for temperature control. Fingers entering the reactor were used for temperature control. [0004] The production capacity of this fluidized bed reactor is low, and the finger tubes in the reactor have potential safety hazards of being worn ou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
Inventor 张虎陈自力秦西鸣徐岩吕昌彦宋安宁
Owner SHAANXI TIANHONG SILICON IND
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