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Composition Of An Aqueous Etchant Containing A Precursor Of Oxidant And Patterning Method For Conductive Circuit

A conductive circuit and etchant technology, which is applied in the field of aqueous etchant composition, conductive circuit structure and conductive circuit patterned preparation, to achieve the effects of simplifying the preparation method, reducing the production cost and being easy to control.

Inactive Publication Date: 2014-10-22
POLYCHEM UVEB INT CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The existing technologies directly use highly corrosive or oxidizing strong oxides, expensive and complicated preparation methods to form patterned conductive patterns

Method used

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  • Composition Of An Aqueous Etchant Containing A Precursor Of Oxidant And Patterning Method For Conductive Circuit
  • Composition Of An Aqueous Etchant Containing A Precursor Of Oxidant And Patterning Method For Conductive Circuit
  • Composition Of An Aqueous Etchant Containing A Precursor Of Oxidant And Patterning Method For Conductive Circuit

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Embodiment 1

[0027] Embodiment 1: applied to electronic devices

[0028] Such as figure 1 As shown, the conductive substrate 1 can be applied to an electronic device 2 with a sensor 21 (Sensor) function to electrically connect the conductive substrate 1 formed by an aqueous etchant of a strong oxide precursor; in addition, the conductive The base material 1 can also be applied to include printed electronics (Printed Electronics), sensor (Sensor), display (Display), organic light emitting diode (OLED), touch panel (Touch Panel), electronic circuit board (Electronic Circuit Board), electrode (Electrode), EL (EL), Antenna (Antenna), Solar Cell (Solar Cell) and other electronic devices with different functions.

Embodiment 2

[0029] Embodiment 2: Utilize aqueous etchant of the present invention to carry out the preparation method of patterning conductive layer

[0030] Such as figure 2 As shown in the figure of the embodiment of the preparation method of the present invention, the specific preparation method for patterning the conductive layer using the aqueous etchant of the chlorine-containing strong oxide precursor of the strong oxide includes:

[0031] Covering the surface of the substrate 10 with a conductive layer 20 composed of a conjugated intrinsically conductive conductive polymer;

[0032] Covering a layer of etchant layer 30 made of the aqueous etchant on a specific (Predetermined) area on the surface of the conductive layer 20 that needs to be oxidized;

[0033] Use any one or combination of drying, heating or radiating light to make the strong oxide precursor produce a strong oxide, and perform etching by oxidizing the contacted conductive layer 20, so that the electrical resistance...

Embodiment 3

[0035] Embodiment 3: Etching the conductive layer by irradiation with radiant light

[0036] Such as image 3 As shown, the strong oxide produced by the irradiation of radiant light to oxidize the contacted conductive layer 20 for etching can be further irradiated through a photomask (Photo Mask) 50, and the photomask 50 defaults to The light-transmitting region 501 that needs to be oxidized for patterning, and the non-transmitting region 502 that does not need to be oxidized, achieve radiation light irradiating the etchant layer 30 through the light-transmitting region 501 of the mask 50, so that the etchant that is irradiated by the radiated light The strong oxide precursor of layer 30 produces a strong oxide that etches by oxidizing the contacted conductive layer 20 to form non-conductive regions 201, while the regions not exposed to radiant light and shaded by non-transmissive regions 502 form conductive lines 202. The wavelength of the aforementioned radiated light is a...

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Abstract

The present invention is primarily related to the composition of an aqueous etchant containing a precursor of oxidant and patterning methods for conductive circuits, in which the chemical structure of the precursor contains chlorine and can produce oxidants through various reactions. And, the patterned conductive circuits can be used for electronic devices, including printed electronics, sensors, displays, organic light emitting diodes (OLED), touch panels, electronic circuit boards, electrodes, electroluminescent (EL) films, antennas, and solar cells.

Description

technical field [0001] The present invention relates to a composition of an aqueous etchant containing a strong oxide precursor (Precursor) and a conductive circuit structure and a conductive circuit patterning (Patterning) preparation method, especially to an electronic device applied to the structure of a conductive substrate , and using the aforementioned water-based etchant to form a desired conductive line pattern on the conductive layer. Background technique [0002] At present, etchant mostly uses strong oxides to chemically etch the conductive film to form the required patterned conductive pattern. The disadvantages are poor stability, difficult control of the quality of the output product, and easy corrosion and damage to the tooling. In addition, there are also preparation methods that use high-energy charged particle beams to form conductive patterns, or use more exposure and development. The conductive circuit patterning technology of the existing conductive sub...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/32C23F1/02H05K3/06
CPCH05K3/067H05K3/06H05K2203/0789C09K13/06
Inventor 杨永树韩俊杰
Owner POLYCHEM UVEB INT CORP
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