Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas

A pure gas, ultra-high technology, applied in the field of ultra-high-purity gas pretreatment, which can solve the problems of no ultra-high-purity gas available and unacceptable analysis time.

Inactive Publication Date: 2014-11-19
NAT INST OF METROLOGY CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But for laboratories and analytical testing institutions, firstly, there is not a large amo...

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  • Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas
  • Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas

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Embodiment 1

[0029] figure 1 It is a schematic diagram of the pretreatment system for analysis of trace moisture in ultra-high purity gas provided by the present invention. Depend on figure 1 As shown, the system includes an ultra-high-purity gas sample gas cylinder 1, a pressure reducing valve 3, a three-way flow valve 4, a first diaphragm valve 6 and The second diaphragm valve 8, wherein a trace moisture analyzer 7 is connected between the first diaphragm valve 6 and the second diaphragm valve 8. The first diaphragm valve 6 and the second diaphragm valve 8 mainly prevent the moisture in the environment from entering the trace moisture analyzer 7, and protect the trace moisture analyzer 7, and the structure of the diaphragm valve itself has small dead volume and airtightness nice features. In addition, a high-vacuum system 5 is connected to the port C12 of the three-way flow valve 4, and the high-vacuum system 5 performs high-vacuum treatment on the pipeline 2, the pressure reducing va...

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Abstract

The invention discloses a pre-processing system and a pre-processing method of trace moisture analysis in ultrahigh-purity gas. An ultrahigh-purity gas sample bottle is connected to a pressure-reducing valve through a pipeline. A three-way flow path valve, a first diaphragm valve, a trace moisture analysis instrument and a second diaphragm valve are successively connected to the downstream of the pressure-reducing valve in a flow direction of an ultrahigh-purity gas sample through the pipeline. One end of the three-way flow path valve is detachably connected to a high-vacuum system. The pre-processing method correspondingly includes following steps: enabling the ultrahigh-purity gas sample to pass through a simple purging device and enabling moisture in the device to be rapidly discharge through a vacuum process in the high-vacuum system and a heating process in a heating device to complete the pre-processing operation before the trace moisture analysis. The pre-processing system and the pre-processing method of the trace moisture analysis in the ultrahigh-purity gas can allow moisture to be rapidly discharged, can reduce consumption of the ultrahigh-purity gas sample, saves time of detection of the ultrahigh-purity gas and increases work efficiency.

Description

technical field [0001] The invention relates to pretreatment of ultra-high-purity gas, in particular to a pre-treatment system and method for analyzing trace moisture in ultra-high-purity gas. Background technique [0002] In today's gas industry chain, ultra-high-purity gases are more and more widely used, especially in the electronic information industry. It is an indispensable raw material for industrial production and is used in thin film, etching, doping, vapor deposition, diffusion and other processes. In addition, ultra-high-purity gases also have certain applications in nuclear industry, national defense and other fields. With the rapid development of my country's high-tech industry, the demand for ultra-high-purity gas quality is getting higher and higher, especially for the detection of micro-trace impurities in ultra-high-purity gas. Generally, the purity of ultra-high-purity gas is above 99.9999%, and the moisture content in ultra-high-purity gas is usually bet...

Claims

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Application Information

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IPC IPC(8): G01N33/00G01N1/44
Inventor 胡树国
Owner NAT INST OF METROLOGY CHINA
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