Superconducting single-photon detector with phase grating and manufacturing method for superconducting single-photon detector with phase grating

A single-photon detector and phase grating technology, which is applied in the manufacture of semiconductor devices, instruments, and final products, can solve problems such as difficult fabrication, low absorption efficiency, and low detection efficiency of superconducting single-photon detectors, and achieve high detection Efficiency, absorption efficiency improvement effect

Inactive Publication Date: 2014-11-26
NANJING UNIV
View PDF8 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, due to the low absorption efficiency of the niobium nitride film itself, the system detection efficiency of the superconducting single photon detector is low.
At the same time, since the detection rate of the superconducting nanowire single photon detector is related to the dynamic inductance of the nanowire, the larger the dynami

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Superconducting single-photon detector with phase grating and manufacturing method for superconducting single-photon detector with phase grating
  • Superconducting single-photon detector with phase grating and manufacturing method for superconducting single-photon detector with phase grating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] The present invention will be described in further detail below in conjunction with the accompanying drawings of the description.

[0023] 1. Structure of superconducting single photon detector with phase grating

[0024] Such as figure 1 , figure 2 As shown, a superconducting single photon detector with a phase grating includes a high-resistance silicon substrate 1 , a reflective layer 2 , niobium nitride nanowires 3 and a phase grating 5 . The niobium nitride nanowire 3 is laid on the reflective layer 2 to form a nanowire region. The radiation layer 2 is made of transparent material, specifically silicon dioxide. The radiation layer 2 is laid on the high-resistance silicon substrate 1 and is located between the niobium nitride nanowire 3 and the high-resistance silicon substrate 1 . The thickness L of the radiation layer 2 satisfies Among them, λ is the wavelength of the incident light, n 1 is the refractive index of the reflective layer material, and n is a p...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a superconducting single-photon detector with a phase grating and a manufacturing method for the superconducting single-photon detector with the phase grating. The superconducting single-photon detector with the phase grating is characterized in that the phase grating is arranged on a nanowire area of a conventional superconducting single-photon detector based on niobium nitride. The grating height of the phase grating is odd-number times the thickness corresponding to the phase of the wavelength pi of incident light. The phase grating on the nanowire area generates the focusing interference effect on light beams, niobium nitride nanowires are located at the focal position, and therefore the absorption efficiency of the niobium nitride nanowires to photons is improved. Simulation results show that the superconducting single-photon detector with the phase grating has the quite high detection efficiency in multiple frequency bands of visible light and infrared light, and the photon absorption efficiency is as high as 72% when the wavelength is 850 nm.

Description

technical field [0001] The invention relates to a highly sensitive single-photon or extremely weak light signal detector, in particular to a superconducting single-photon detector based on niobium nitride, which can be applied to the detection of single-photon or extremely weak light signals in visible light and near-infrared bands . Background technique [0002] The superconducting nanowire single photon detector is currently the most popular single photon detector structure in the world. It uses a very thin superconducting film (usually with a thickness of 4nm to 8nm) to prepare a nanowire with a width of 80nm. Below the critical temperature, a bias current lower than the superconducting critical current is passed. When the photons hit the nanowire and are absorbed by the nanowire to form a heat island, the current density on the nanowire is greater than the superconducting current density, thereby quenching and generating a voltage The pulse, picked up by the readout cir...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H01L31/0232H01L31/09H01L31/18G01J11/00
CPCH01L31/02327H01L31/09H01L31/1828Y02P70/50
Inventor 康琳顾敏张蜡宝吴培亨
Owner NANJING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap