A high-speed real-time variable resistance chip based on voltage control
A technology of voltage control and electrode control, applied in the direction of adjustable resistors, resistors, circuits, etc., can solve the problems of small resistance changes, the need for independent preparation of materials, and large peripheral circuits, etc., to achieve short conversion time, Excellent anti-static and electromagnetic interference, simple effect of peripheral circuits
Inactive Publication Date: 2016-11-09
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
However, there are few changes in its resistance value, and the production process is complicated, and the materials need to be prepared independently.
Patent CN201310346960 proposes a variable resistor with multiple gears based on MEMS technology, but the variable resistor has a large number of pins, complex control, and huge peripheral circuits.
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[0024] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.
[0025] Such as figure 1As shown, the high-speed real-time variable resistance chip based on voltage control in this embodiment includes: substrate 1, control bridge array 2, insulating layer 3, resistance bridge array 4, passivation layer 5, metal interconnection 7, a pair of control electrodes Pad 62 and a pair of resistance electrode pads 64; wherein, the control bridge array 2 is formed on the substrate 1, including a plurality of parallel control bridges, each control bridge includes a pair of control electrodes, and the control bridge connecting the two Area 22, the width of each control bridge area 22 is not the same, and a plurality of control electrodes are connected in parallel to form a pair of control bridge array electrodes 21; the insulating layer 3 is covered on the control bridge array 2; on the insulating layer 3, a pair of contr...
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The invention discloses a high-speed real-time variable resistance chip based on voltage control. The variable resistance chip of the present invention includes: substrate, control bridge array, insulating layer, metal interconnection, resistance bridge array, passivation layer, a pair of control electrode pads and a pair of resistance electrode pads; control bridge array access control The circuit receives the control signal from the control circuit, and some control bridges undergo electric explosion, causing the corresponding resistance bridges to disconnect, and the total resistance of the resistance bridge array connected to the controlled circuit changes. The variable resistance chip of the present invention only consumes electric energy at the moment when the resistance value changes; it has excellent antistatic and electromagnetic interference characteristics; the switching time of the chip is also short; the precision of the resistance is high, which is beneficial for the chip to be used in applications requiring precise control of resistance It is used in various occasions; it has good real-time characteristics, short response time for resistance changes, irreversible changes, and is suitable for high dynamic one-time applications; at the same time, it has the characteristics of small number of pins, wide selection range of resistance values and simple peripheral circuits.
Description
technical field [0001] The invention relates to micro-electromechanical system MEMS, in particular to a high-speed real-time variable resistance chip based on voltage control. Background technique [0002] A variable resistor is a resistor whose resistance value can be adjusted, and is used in occasions where the circuit current needs to be adjusted or the circuit resistance value needs to be changed. Most of the existing variable resistors are based on material characteristics, and use external electric field control to change the physical properties of the resistor material to achieve the purpose of changing the resistance value. Patent CN1763985A provides a method for designing variable resistors based on metal and non-metallic compound materials. The resistance value of the resistors can be changed by applying pulse voltage to the resistors made of the materials. Patent CN102655210A provides a method for designing a variable resistor based on metal oxide materials, and ...
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IPC IPC(8): H01L23/64H01C10/00
Inventor 丁旭冉娄文忠赵越
Owner BEIJING INSTITUTE OF TECHNOLOGYGY