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Dissociation agent, dissociation technique, flexible display device and production technique of flexible display device

A flexible display and preparation process technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of thin-film electronic device damage, complex procedures, damage to electronic devices, etc., and achieve rapid dissociation and simple procedures. , easy to prepare effect

Active Publication Date: 2014-12-10
GUANG ZHOU NEW VISION OPTO ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are some defects in this method in the prior art: since the flexible substrate tends to have strong adhesion with the hard substrate, when the flexible thin film substrate is detached from the hard substrate, it tends to be Damage the flexible substrate film and the electronic devices on it, making this preparation process inoperable in reality
Although this method makes the dissociation of the flexible substrate easier, the introduction of the sacrificial layer directly leads to more complicated procedures, which greatly increases the production cost, and at the same time, it is easy to cause thin films when modifying the sacrificial layer. damage to electronics

Method used

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  • Dissociation agent, dissociation technique, flexible display device and production technique of flexible display device
  • Dissociation agent, dissociation technique, flexible display device and production technique of flexible display device
  • Dissociation agent, dissociation technique, flexible display device and production technique of flexible display device

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Embodiment 1

[0036] A flexible display device and a manufacturing process thereof. The preparation process is to firstly prepare a flexible film substrate 200 on the substrate 100, then prepare a thin film device on the flexible film substrate 200 to form a primary body, and finally dissociate the primary flexible film substrate 200 from the substrate 100 by a dissociating agent to obtain Finished flexible display device.

[0037] It should be noted that the substrate 100 is a rigid substrate 100 , and the substrate 100 , the flexible thin film substrate 200 , thin film devices and their preparation methods are common knowledge in the art, and will not be repeated here.

[0038] The substrate 100 may be a substrate 100 made of glass, metal, single crystal silicon or plastic, and the substrate 100 may be a planar substrate or a curved substrate.

[0039] The flexible film substrate 200 can be polyimide (Polyimide, PI), polyethylene terephthalate (Polyethylene terephthalate, PET), polyethyl...

Embodiment 2

[0046] A manufacturing process of a flexible display device, the other features of which are the same as those of Embodiment 1 above, except that the flexible thin film substrate 200 is separated from the substrate 100 by means of mist diffusion. like figure 2 As shown, specifically, the precursor is put into the reaction chamber 300 filled with vaporized or atomized dissociating agent, and then taken out to separate the flexible film substrate 200 from the substrate 100 .

[0047] In this method, the gasified or atomized dissociating agent in the reaction chamber 300 penetrates into the interface between the flexible film substrate 200 and the substrate 100, and weakens the gap between the flexible film substrate 200 and the hard substrate 100 by chemical reaction. The adhesive force makes it easy to separate the flexible film substrate 200 from the substrate 100 . This method is suitable for situations where the requirement for dissociation time is not high.

Embodiment 3

[0049] A manufacturing process of a flexible display device, the other features of which are the same as those of Embodiment 1 above, except that the flexible film substrate 200 is separated from the substrate 100 by soaking. like image 3 As shown, specifically, the substrate 100 and the part of the substrate 100 in contact with the flexible film substrate 200 are soaked in a dissociating agent solution for a moment, and then taken out to dissociate the flexible film substrate from the substrate.

[0050] In this method, the dissociating agent is soaked, so that the dissociating agent penetrates into the interface between the flexible film substrate 200 and the substrate 100, and the adhesive force between the flexible film substrate 200 and the hard substrate 100 is weakened by chemical reaction, so that the flexible film The substrate 200 is easily separated from the substrate 100 . This method dissociates quickly.

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Abstract

The invention relates to a dissociation agent, a dissociation technique, a flexible display device and a production technique of the flexible display device. The dissociation agent is reductive and comprises at least one solution of oxalic acid, hydrochloric acid, hydrogen sulfide, hydrogen sulfide, ferrous sulfate, sodium sulfite, stannous chloride, potassium borohydride or sodium borohydride. The production technique is characterized in that a flexible film substrate is produced on a base plate, then a film device is produced on the flexible film substrate to form a primary body, and finally the flexible film substrate of the primary body and the base plate are dissociated through the dissociation agent to form the finished flexible display device. By adopting the dissociation agent and the dissociation technique, the flexible film substrate and the base plate can be dissociated easily, fast and conveniently. According to the flexible display device and the production technique of the flexible display device, production of sacrificial layers is avoided, and the produced substrate is directly dissociated from the base plate. The process is simple, production is convenient and dissociation is fast.

Description

technical field [0001] The invention relates to the field of flexible display technology, in particular to a dissociation agent used for dissociation of a substrate and a substrate in the preparation of a flexible display device, a dissociation process, a flexible display device using the dissociation agent and the dissociation process and its Preparation Process. Background technique [0002] In the preparation of flexible display devices, a flexible thin film substrate is first formed on a hard substrate, and then devices are fabricated on the flexible thin film substrate, and finally the substrate is separated from the flexible thin film substrate to obtain a finished device without the substrate. However, there are some defects in this method in the prior art: since the flexible substrate tends to have strong adhesion with the hard substrate, when the flexible thin film substrate is detached from the hard substrate, it tends to be Damage to the flexible substrate film a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02
CPCH01L27/1266H01L21/7813H01L2021/775H10K59/12H10K59/1201H10K71/80
Inventor 徐苗李洪濛许志平王磊邹建华陶洪彭俊彪
Owner GUANG ZHOU NEW VISION OPTO ELECTRONICS TECH
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