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Displacement representation method for preparing nanochannel fracture appearance sample

A characterization and morphology technology, which is applied in the field of cross-sectional morphology characterization of nano-channels after hot-pressing bonding based on surface modification technology, can solve the problems of difficulty in the observation and positioning of nano-channel electron microscopy, difficulty in preparation of nano-channel cross-sections, etc. The effect of clear cross-section morphology, shortened observation time, and reduced preparation difficulty

Inactive Publication Date: 2015-01-14
DALIAN UNIV OF TECH
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to propose a replacement characterization method for preparing nanochannel cross-sectional morphology samples in view of the difficulty in preparing nanochannel sections after oxygen plasma assisted thermocompression bonding and the difficulty in positioning nanochannels under an electron microscope. Used to accurately observe the cross-sectional morphology of nanochannels

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  • Displacement representation method for preparing nanochannel fracture appearance sample
  • Displacement representation method for preparing nanochannel fracture appearance sample
  • Displacement representation method for preparing nanochannel fracture appearance sample

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[0026] The specific implementation manner of the patent of the present invention will be described in detail below in conjunction with the technical scheme and accompanying drawings.

[0027] figure 1 It is a schematic diagram of the cross-sectional morphology sample of the nanochannel prepared by the displacement characterization method after thermocompression bonding.

[0028] Young's modulus and hardness of PMMA surface layer material under the condition of bonding temperature in table 1

[0029]

[0030] Table 2 Young's modulus and hardness of PET surface material under bonding temperature conditions

[0031]

[0032] 1. The effect of oxygen plasma treatment on the thermocompression bonding strength was analyzed by tensile strength measurement. The effect of oxygen plasma treatment on the Young's modulus and hardness of the polymer surface material (thickness 0-100nm) was quantitatively analyzed by using the surface material analysis experiment, and it was proved t...

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Abstract

The invention discloses a displacement representation method for preparing a nanochannel fracture appearance sample, belonging to the field of the nano structure representation. The method comprises the following steps of thermally pressing and bonding a nanochannel substrate and a cover plate, which are not subjected to the oxygen plasma treatment; separating, freezing and breaking the thermally-pressed and bonded nanochannel substrate and cover plate to obtain a sample with a complete nanochannel fracture appearance; carrying out observation representation on the appearances of a nanochannel on the substrate and the cover plate respectively, and obtaining the width and depth of the nanochannel and the height of a nano projection on the cover plate; obtaining a real width and a real depth of the nanochannel according to the width and depth of the nanochannel and the height of the nano projection on the cover plate, wherein the real width of the nanochannel is equal to the width of the nanochannel, and the real depth of the nanochannel is equal to the difference between the depth of the nanochannel and the height of the nano projection on the cover plate. By adopting the method, the difficulty in preparing the nano channel fracture after the thermal pressing and bonding can be effectively alleviated. The fracture appearance of the nanochannel prepared by the displacement representation method is complete and clear, and the nanochannel is easier to position under a scanning electron microscope.

Description

technical field [0001] The invention relates to the field of nanostructure characterization, in particular to a surface modification technology-based method for characterization of the cross-sectional morphology of nanochannels after thermocompression bonding. Background technique [0002] In recent years, with the continuous development of microfluidic chip manufacturing technology and nanofabrication technology, nanofluidic chips have developed rapidly. The special properties of nanochannels in nanofluidic chips, such as surface charge, electric double layer, increased viscosity and reduced electroosmotic flow, make nanofluidic chips play an important role in the fields of medical treatment and biochemical analysis. Polymer nanofluidic chips are attracting increasing attention because of their excellent optical properties, good insulating properties, low cost, short production cycle and good biocompatibility, and their manufacturing technology has attracted the attention o...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/28
Inventor 邹赫麟殷志富程娥
Owner DALIAN UNIV OF TECH
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