Full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and preparation method of full-silicon MEMS methane sensor

A methane sensor and silicon layer technology, which is applied in the manufacture of microstructure devices, processes for producing decorative surface effects, coatings, etc., can solve problems that cannot be used for detection and alarm, poor consistency, and difficult mass production

Active Publication Date: 2015-01-28
CHINA UNIV OF MINING & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as the heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of power
Therefore, the application requirements of the Internet of Things for methane se

Method used

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  • Full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and preparation method of full-silicon MEMS methane sensor
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  • Full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and preparation method of full-silicon MEMS methane sensor

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Embodiment

[0067] Example: in figure 1 , figure 2 , image 3 Among them, the all-silicon MEMS methane sensor includes a silicon element 101, a fixed end 102 and a silicon frame support 103; the silicon frame support 103 is an SOI substrate, including a silicon substrate 31, a buried A layer of silicon oxide 32 and a top layer of silicon 33 on the buried layer of silicon oxide 32, the top layer of silicon 33 is single crystal silicon;

[0068] The fixed end 102 is on the buried layer silicon oxide 32 on the silicon frame support 103; the fixed end 102 includes the silicon layer 21, the silicon oxide layer 23 outside the silicon layer 21 and the metal Pad 22 used as an electrical lead-out pad The silicon layer 21 of the fixed end 102 is arranged on the buried layer of silicon oxide 12; the supporting silicon layer 21 of the fixed end 102 is provided with a doped silicon layer 24; the metal Pad 22 of the electric lead pad is arranged on the silicon On the silicon oxide layer 23 above th...

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Abstract

The invention discloses a full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and a preparation method of the full-silicon MEMS methane sensor, is suitable for being used under an industrial and mining environment, belongs to a methane sensor as well as a preparation method and a detection method thereof, and particularly belongs to a methane sensor adopting an MEMS processing technology and a methane detection method thereof. The full-silicon MEMS sensor is prepared from a heating material with monocrystalline silicon serving as a heating element; the heating element is also used as a methane sensitive element; furthermore, the detection on low-concentration methane can be realized without a catalyst carrier and a catalyst material. The full-silicon MEMS methane sensor is processed by taking an SOI (silicon on insulator) silicon slice as a substrate and adopting an MEMS technology; the processing technology is compatible with a CMOS technology (complementary metal oxide semiconductor) technology. The full-silicon MEMS methane sensor has the characteristics of low power consumption, high sensitivity, no influence from oxygen deficit, and no influence of carbon deposition, poisoning and the like from catalysts.

Description

technical field [0001] The invention relates to a methane sensor and a gas detection application and preparation method, and is especially suitable for an all-silicon MEMS methane sensor used for gas prevention in industrial and mining production, and a gas detection application and preparation method. Background technique [0002] At present, catalytic combustion methane sensors based on traditional platinum wire heating are still widely used in coal mines. The principle is based on the heat release effect of the catalytic combustion reaction of methane gas, and there are many disadvantages due to the use of catalysts. Such as short adjustment cycle, carbon deposition, poisoning, activation, etc. are fundamentally due to the use of catalysts and catalyst carriers. The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as a heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of ...

Claims

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Application Information

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IPC IPC(8): G01N27/14B81C1/00
CPCG01N27/16
Inventor 马洪宇
Owner CHINA UNIV OF MINING & TECH
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