Flexible temperature sensor based on graphene nanometer wall and preparing method thereof

A graphene nano wall and temperature sensor technology, applied in the field of sensors, can solve the problems of non-flexible biocompatibility, poor biocompatibility, etc., and achieve the effects of good biocompatibility, convenient processing and simple structure

Inactive Publication Date: 2015-02-25
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the sensitivity of these sensors needs to be impr

Method used

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  • Flexible temperature sensor based on graphene nanometer wall and preparing method thereof
  • Flexible temperature sensor based on graphene nanometer wall and preparing method thereof

Examples

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Example Embodiment

[0044] Example 1: Fabrication of a graphene nanowall / PDMS composite material temperature sensor and testing of its sensing characteristics

[0045] Step 1: Preparation of graphene nanowalls

[0046] First place the substrate copper foil in acetone, 95vol% ethanol, and pure water for ultrasonic cleaning for 2 minutes, blow dry with nitrogen, and then place it in the vacuum chamber of the tubular CVD system to prepare graphene nanowalls to obtain graphene nanometer walls. wall.

[0047] Step 2: Fabrication of thermal resistors for flexible temperature sensors based on graphene nanowalls

[0048] Put the obtained graphene nano-wall in the ferric nitrate corrosion solution to completely remove the copper, then use the prepared PDMS with a thickness of 50um to pick up and combine the graphene nano-wall from below, and then use the obtained structure. Repeated cleaning with ionized water, hydrochloric acid, etc., and drying with nitrogen gas to obtain a graphene nanowall / polymer (...

Example Embodiment

[0053] Example 2: Fabrication of PDMS / graphene nano-wall composite temperature sensor and testing of its sensing characteristics

[0054] Step 1: Preparation of graphene nanowalls

[0055] First place the substrate copper foil in acetone, 95vol% ethanol, and pure water for ultrasonic cleaning for 2 minutes, blow dry with nitrogen, and then place it in the vacuum chamber of the tubular CVD system to prepare graphene nanowalls to obtain graphene nanometer walls. wall.

[0056] Step 2: Fabrication of thermal resistors for flexible temperature sensors based on graphene nanowalls

[0057] The resulting graphene nanowall was spin-coated with a layer of PDMS with a thickness of 50 um, and placed in an oven at 80°C to cure the PDMS to obtain a PDMS / graphene nanowall / two-dimensional copper structure. The resulting structure is repeatedly cleaned with deionized water, hydrochloric acid, etc., and dried with nitrogen to obtain a temperature sensor with a two-layer structure of PDMS / gra...

Example Embodiment

[0062] Example 3: Fabrication of PDMS / graphene nano-wall / PDMS composite material temperature sensor and testing of its sensing characteristics

[0063] Step 1: Preparation of graphene nanowalls

[0064] First place the substrate copper foil in acetone, 95vol% ethanol, and pure water for ultrasonic cleaning for 2 minutes, blow dry with nitrogen, and then place it in the vacuum chamber of the tubular CVD system to prepare graphene nanowalls to obtain graphene nanometer walls. wall.

[0065] Step 2: Fabrication of thermal resistors for flexible temperature sensors based on graphene nanowalls

[0066] The resulting graphene nanowall was spin-coated with a layer of PDMS with a thickness of 50 um, and placed in an oven at 80°C to cure the PDMS to obtain a PDMS / graphene nanowall / two-dimensional copper structure. Then the resulting structure was repeatedly cleaned with deionized water, hydrochloric acid, etc., and dried with nitrogen gas to obtain a two-layer structure of PDMS / graph...

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Abstract

The invention relates to a flexible temperature sensor based on a graphene nanometer wall and a preparing method thereof. The temperature sensor comprises polymer and a graphene nanometer wall body. The polymer is combined to the lower surface of the graphene nanometer wall body or embedded in the upper surface of the graphene nanometer wall body. The preparing method comprises the steps that after the graphene nanometer wall body made of the tubular CVD is transferred through the polymer transferring method, a graphene nanometer wall body/polymer double-layer structure is formed, the two ends of the graphene nanometer wall body are connected through a silver paste coating method to serve as an electrode with silver or other metal wires, spin coating can be carried out on upper layer of polymer, and a polymer/graphene nanometer wall/polymer three-layer structure is formed. The temperature sensor made of the graphene nanometer wall/polymer has the advantages of being simple in structure, convenient to machine, high in flexibility, light in weight, good in flexibility and biology compatibility and the like, and has very good application prospects in the fields of instruments, meters, photoelectric devices, flexible electronic skins and the like.

Description

technical field [0001] The invention belongs to the field of sensors, and relates to a flexible temperature sensor based on a graphene nano-wall and a preparation method thereof. Background technique [0002] A temperature sensor is a sensor that senses temperature and converts it into a usable output signal. According to the characteristics of sensor materials and electronic components, it can be divided into two types: thermal resistance type and thermocouple type. The thermal resistance temperature sensor is a sensor thermometer that uses the principle that the resistance value of a conductor or semiconductor changes with temperature. Thermal resistance temperature sensors are divided into two categories: metal thermal resistance and semiconductor thermistor. It will change the resistance value as the temperature rises. If it rises with the temperature and the resistance value also rises, it is called a positive resistivity. If it decreases with the temperature rise, it...

Claims

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Application Information

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IPC IPC(8): G01K7/16
Inventor 褚金杨俊魏大鹏宋雪芬李占成史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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